OPTICAL PROPERTIES OF NANOMETER SILICON PREPARED BY SILICON ION IMPLANTED INTO SiO_2 LAYERS

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OPTICAL PROPERTIES OF NANOMETER SILICON PREPARED BY SILICON ION IMPLANTED INTO SiO_2 LAYERS
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DING Kun LI Guo Hua HAN He Xiang WANG Zhao Ping. OPTICAL PROPERTIES OF NANOMETER SILICON PREPARED BY SILICON ION IMPLANTED INTO SiO_2 LAYERS[J]. Journal of Infrared and Millimeter Waves,1999,18(6):417~422

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