The multi-pass band micro-filters array was fabricated by the techniques of masking and lifting-off or etching of the films. The spectrally distingulshable detectors array is composed of the detectors array and the micro-filters array.The design and fabrication of the threer-channel short wave infrared filters array,and the development of the spectrum distinguishable detectors array are reported.
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Cheng Shiping, Yan Yixun, Zhang Fengshan, Xu Buyun, Zhu Cuiyuan. DEVELOPMENT OF THREE-CHANNEL SHORT-WAVE IR SPECTRUM DISTINGUISHABLE DETECTOR ARRAY[J]. Journal of Infrared and Millimeter Waves,1994,13(6):401~404