Enhanced infrared absorption of NiCr film fabricated on LiTaO3 crystal material for 14~16 µm application
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a State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,No. 4,Section 2,North Jianshe Road,a State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,No. 4,Section 2,North Jianshe Road,a State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,No. 4,Section 2,North Jianshe Road,a State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,No. 4,Section 2,North Jianshe Road,a State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,No. 4,Section 2,North Jianshe Road,a State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,No. 4,Section 2,North Jianshe Road

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    Abstract:

    Nano–scale metallic films have been proven to be an effective infrared absorption layer for pyroelectric detector operated at 14-16um spectral range for space applications. Improved infrared absorption can be achieved by adjusting the thickness and surface characteristics of nano–scale Nickel–chromium (NiCr) film deposited on the LT (lithium tantalite) crystal materials. By regulating the thickness of the crystal materials, the absorption wavelength is adjustable as well by changing the depth of anti-reflection cavity. To enhance the infrared absorption further, chemical corrosion is applied on this film, which generates rough nano–scale surface structure and greatly increases the absorption surface area. By combining this two methods, specified infrared wavelength absorption could be distinctly enhanced, and the manufacturing process is fully compatible and easily to realize. Experiment results suggest that the absorption performance which could be controlled agree well with the simulation and design.

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LIU Zi-Ji, LIANG Zhi-Qing, HE Xuan, MA Zhen-Dong, GOU Jun, JIANG Ya-Dong. Enhanced infrared absorption of NiCr film fabricated on LiTaO3 crystal material for 14~16 µm application[J]. Journal of Infrared and Millimeter Waves,2017,36(4):389~392

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History
  • Received:November 07,2016
  • Revised:April 11,2017
  • Adopted:March 06,2017
  • Online: August 29,2017
  • Published:
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