Batch production technology of 50 mm×50 mm HgCdTe LPE materials with high performance
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Shanghai Institute of Technical Physics, Chinese Academy of Sciences.,Shanghai Institute of Technical Physics, Chinese Academy of Sciences.,Shanghai Institute of Technical Physics, Chinese Academy of Sciences.,Shanghai Institute of Technical Physics, Chinese Academy of Sciences.,Shanghai Institute of Technical Physics, Chinese Academy of Sciences.,Shanghai Institute of Technical Physics, Chinese Academy of Sciences.,Shanghai Institute of Technical Physics, Chinese Academy of Sciences.,Shanghai Institute of Technical Physics, Chinese Academy of Sciences.

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    Abstract:

    High performance Hg1-xCdxTe epitaxial materials with the size of 50 mm×50 mm were produced by Te-rich vertical LPE technology. The sample holder with triangle cylinder structure and a function to prevent HgCdTe solution soaking into the back of the substrates was designed and used to obtain 3 epitaxial materials for each growth process. In order to obtain uniform epilayers, the temperature uniformity and composition uniformity of HgCdTe solution during the process were improved. The STDDEVs for x-value and thickness distributions of 50 mm×50 mm epitaxial material are 0.000 4 and 0.4 μm, respectively. The average values of x-value and thickness of three epitaxial wafers grown at the same time have a very small difference, less than 0.0004 and 0.1 μm, respectively. The differences of average x-values and thickness values from run-to-run are about ±0.002 and ±2 μm, respectively. In order to control the defects of HgCdTe epilayers, the lattice parameters and defects of CdZnTe substrates have been strictly controlled. The full width at half maximum (FWHM) of X-ray double-crystal rocking curve for HgCdTe epilayers was controlled within 30″. The dislocation density is less than 1×105 cm-2, and the surface defect density is less than 5 cm-2. Utilizing annealing technique, the carrier concentration of Hg vacancy doped p-type Hg0.78Cd0.22Te epilayers at 77 K were controlled in a range of 8 ~ 20×1015 cm-3 and their hole mobility exceed 600 cm2/Vs. The material performance and production capacity based on the LPE technique described above can satisfy the demand for fabricating large format HgCdTe infrared focal plane arrays.

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SUN Quan-Zhi, SUN Rui-Yun, WEI Yan-Feng, SUN Shi-Wen, ZHOU Chang-He, XU Chao, YU Hui-Xian, YANG Jian-Rong. Batch production technology of 50 mm×50 mm HgCdTe LPE materials with high performance[J]. Journal of Infrared and Millimeter Waves,2017,36(1):49~54

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History
  • Received:March 08,2016
  • Revised:August 25,2016
  • Adopted:August 26,2016
  • Online: March 28,2017
  • Published:
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