KANG Bing-Xin
Department of Optoelectronics, Beijing Institute of TechnologyLI Hua-Gao
Department of Solid Image Sensor, The 44th Research Institute of China Electronic EquipmentWANG Ling-Xue
Department of Optoelectronics, Beijing Institute of TechnologyXIONG Ping
Department of Solid Image Sensor, The 44th Research Institute of China Electronic EquipmentCHEN Hong-Bing
Department of Solid Image Sensor, The 44th Research Institute of China Electronic EquipmentLI Li
Department of Solid Image Sensor, The 44th Research Institute of China Electronic EquipmentCAI Yi
Department of Optoelectronics, Beijing Institute of TechnologyDepartment of Optoelectronics, Beijing Institute of Technology,Department of Solid Image Sensor, The 44th Research Institute of China Electronic Equipment,Department of Optoelectronics, Beijing Institute of Technology,Department of Solid Image Sensor, The 44th Research Institute of China Electronic Equipment,Department of Solid Image Sensor, The 44th Research Institute of China Electronic Equipment,Department of Solid Image Sensor, The 44th Research Institute of China Electronic Equipment,Department of Optoelectronics, Beijing Institute of Technology
To enhance quantum efficiency of infrared detectors made of PtSi Schottky barrier, the flat interface of PtSi/p-silicon metal semiconductor was modified to a grating structure. The incident radiation can be coupled with the surface plasma waves within this structure, thus to improve the optical coupling efficiency of the PtSi infrared detector. Based on rigorous coupled-wave analysis method, parameters of the grating structure were optimized and electric field distributions at resonant wavelength were simulated. The quantitative relationship between the optical coupling efficiency and quantum efficiency of PtSi Schottky barrier infrared detector was discussed. Comparing with the flat structure, the average quantum efficiency is evenly increased twice in 3~5 μm wavelength range, and approximately 2.94 and 2.5 times at 3 μm and 3.4 μm, respectively.
KANG Bing-Xin, LI Hua-Gao, WANG Ling-Xue, XIONG Ping, CHEN Hong-Bing, LI Li, CAI Yi. Quantum efficiency enhancement for PtSi infrared detector by surface plasma waves[J]. Journal of Infrared and Millimeter Waves,2016,35(5):550~556
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