Design and analysis of a novel low dark count rate SPAD
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School of Physics and Optoelectronics, Xiangtan University,School of Physics and Optoelectronics, Xiangtan University,Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on a Chip,School of Physics and Optoelectronics, Xiangtan University,Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on a Chip,School of Physics and Optoelectronics, Xiangtan University,Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on a Chip,School of Physics and Optoelectronics, Xiangtan University,Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on a Chip

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    Abstract:

    A novel low dark count rate single-photon avalanche diode (SPAD) device was designed and fabricated with the 0.18 μm CMOS Image Sensor (CIS) technology in this paper. The device is comprised of an effective P+/LNW (light N-well doping) junction for photon detecting and a low concentration N-type diffusing circular guard-ring formed by the deep N-well diffusion. The latter prevents premature edge breakdown (PEB) of the junction and ensures it to operate in Geiger mode. The measured results show that the SPAD achieves a low dark count rate (DCR), and the DCR is 260 Hz at an excess bias voltage of 2V for 8 μm diameter active area structure at room temperature.

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YANG Jia, JIN Xiang-Liang, YANG Hong-Jiao, TANG Li-Zhen, LIU Wei-Hui. Design and analysis of a novel low dark count rate SPAD[J]. Journal of Infrared and Millimeter Waves,2016,35(4):394~397

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History
  • Received:August 23,2015
  • Revised:March 09,2016
  • Adopted:March 10,2016
  • Online: September 09,2016
  • Published:
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