Uniqueness test for thin film fitting in spectroscopic ellipsometry
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Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing and Department of Optical Science and Engineering,Fudan University,Shanghai,Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing and Department of Optical Science and Engineering,Fudan University,Shanghai,Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing and Department of Optical Science and Engineering,Fudan University,Shanghai,Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing and Department of Optical Science and Engineering,Fudan University,Shanghai,Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing and Department of Optical Science and Engineering,Fudan University,Shanghai,Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing and Department of Optical Science and Engineering,Fudan University,Shanghai,Key Laboratory of Infrared Image Materials and Devices, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China,Key Laboratory of Infrared Image Materials and Devices, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China,Key Laboratory of Infrared Image Materials and Devices, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

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    Abstract:

    The thickness and dielectric constants of thin films usually have certain correlation in the fitting procedure of spectroscopic ellipsometry (SE). The choice of different dispersion models may also influence the results and cause errors. As the fitting is influenced by the dispersion models adopted in the analysis, the uniqueness test has been introduced into SE fitting. The results of uniqueness test have been compared with different dispersion models, different film thicknesses, different wavelength ranges and different incident angles using titanium dioxide samples as an example. It is indicated that uniqueness test is efficient in evaluating the fitting for SE measurement. Uniqueness test can also provide quantitative comparison among different dispersion models and contribute to fitting precision.

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WANG Zi-Yi, ZHANG Rong-Jun, TANG Bin, SUN Yuan-Cheng, XU Ji-Ping, ZHENG Yu-Xiang, WANG Song-You, CHEN Liang-Yao, FAN Hua, LIAO Qing-Jun, WEI Yan-Feng. Uniqueness test for thin film fitting in spectroscopic ellipsometry[J]. Journal of Infrared and Millimeter Waves,2015,34(6):663~667

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History
  • Received:July 08,2014
  • Revised:May 28,2015
  • Adopted:December 25,2014
  • Online: December 01,2015
  • Published:
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