Fabrication and performance of Mn-Co-Ni-O thin film infrared detector
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National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences

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    Abstract:

    Spinel oxide Mn-Co-Ni-O (MCNO) thin films were prepared by using a chemical solution deposition method (CSD). The electrical property and device performance based on MCNO thin films were investigated, including the responsivity (RV), noise spectra and the detectivity (D*). MCNO thin film with a thickness of 8μm was prepared and their sheet resistance versus temperature curves are measured. The optical immersed MCNO infrared detector based on Germanium lens was fabricated, and it possesses the advantages of relatively small time constant (~18ms), high responsivity (~4.4×103V/W) and high detectivity (~5×108cm·Hz0.5/W).

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ZHOU Wei, OU Yang-Cheng, WU Jing, GAO Yan-Qing, HUANG Zhi-Ming. Fabrication and performance of Mn-Co-Ni-O thin film infrared detector[J]. Journal of Infrared and Millimeter Waves,2015,34(2):161~165

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History
  • Received:January 13,2014
  • Revised:February 06,2015
  • Adopted:January 24,2014
  • Online: May 18,2015
  • Published: