Resonant IR detectors based on microbridge resonators electrothermally excited and piezoresistively detected using polysilicon resistors of negative TCR
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China Jiliang University,China Jiliang University,China Jiliang University,China Jiliang University,China Jiliang University

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    Abstract:

    A novel type resonant infrared (IR) detector based on microbridge resonators electrothermally excited and piezoresistively detected using polysilicon resistors of negative temperature coefficient of resistance (TCR) was presented. The temperature rise of microbridges due to absorbed infrared radiation reduces the resistance of the excitation resistors and Wheatstone bridges. As a result, both the static component of the exciting power and the Joule heat of Wheatstone bridges accordingly increase with reducing the resistance. It is equivalent to increasing infrared radiation power. From preliminary experimental results, the feasibility of sensing infrared radiation is demonstrated.

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HAN Jian-Qiang, LI Sen-Lin, LI Yan, WANG Xiao-Fei, FENG Ri-Sheng. Resonant IR detectors based on microbridge resonators electrothermally excited and piezoresistively detected using polysilicon resistors of negative TCR[J]. Journal of Infrared and Millimeter Waves,2015,34(2):134~139

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History
  • Received:September 05,2013
  • Revised:February 06,2015
  • Adopted:November 29,2013
  • Online: May 18,2015
  • Published: