Preparation and performance of micro/nano-scale Bi3.15Nd0.85Ti3O12/Si-MCP ferroelectric thin film arrays

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Preparation and performance of micro/nano-scale Bi3.15Nd0.85Ti3O12/Si-MCP ferroelectric thin film arrays
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                        MIAO Feng-JuanMIAO Feng-Juan
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences
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TAO Bai-RuiTAO Bai-Rui
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences
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HU Zhi-GaoHU Zhi-Gao
Key Laboratory of Polar Materials and Devices，Ministry of Education，East China Normal University
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CHU Jun-HaoCHU Jun-Hao
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences
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Affiliation:National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences,National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences,College of Communications and Electronics Engineering, Qiqihar University,National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences
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Abstract:

The micro/nano-scale Bi3.15Nd0.85Ti3O12/Si-MCP (BNT/Si-MCP) ferroelectric thin film arrays were fabricated successfully by the sol-gel, spin-coating and pumping filtration methods. Precursors of BNT were coated on the inner wall of Si-MCP. Bi3.15Nd0.85Ti3O12 thin film supported by Si-MCP were prepared via annealing in oxygen atmosphere at 600℃, 650℃, 700℃ and 750℃, respectively. The ferroelectric properties and microstructures of BNT/Si-MCP film arrays were characterized. The results show that with the increase of annealing temperature, the size of BNT grain localized on the inner wall of Si-MCP increases, the uniformity of the surface and the degree of orientation along the c-axis increase, too. The largest remanent polarization (93.8 μC/cm2) and lowest leakage current of the micro/nano-scale BNT/Si-MCP arrays were obtained annealing at 750℃.

Key words:ferroelectric films, micro-nano film arrays, Si MCP, BNT

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MIAO Feng-Juan, TAO Bai-Rui, HU Zhi-Gao, CHU Jun-Hao. Preparation and performance of micro/nano-scale Bi3.15Nd0.85Ti3O12/Si-MCP ferroelectric thin film arrays[J]. Journal of Infrared and Millimeter Waves,2014,33(2):139~143

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Received:January 12,2013
Revised:September 04,2013
Adopted:January 25,2013
Online: May 13,2014
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