Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
CAO Yuan-Ying, ZHANG Yong-Gang, LI Yao-Yao, GU Yi, LI Ai-Zhen, LI Hao-Si-Bai-Yin. Fabrication of column shape two dimensional photonic crystals: double developments in holographic lithography process[J]. Journal of Infrared and Millimeter Waves,2014,33(1):45~49
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