Simulation analysis of electrical characteristics of strained SiGe channel-on-insulator p-MOSFET
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Institute for Optoelectronic Information Materials,Yunnan University,Institute for Optoelectronic Information Materials,Yunnan University,Institute for Optoelectronic Information Materials,Yunnan University,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Institute for Optoelectronic Information Materials,Yunnan University

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    Abstract:

    In this paper, the strained SiGe-on-Insulator (SGOI) p-MOSFET and Si-on-Insulator (SOI) p-MOSFET are respectively studied via 2-D numerical simulation by ISE TCAD software. The results indicate that compared with the conventional SOI p-MOSFET, the drain-source saturation current of SGOI p-MOSFET almost more than twice, the sub-threshold current of SGOI p-MOSFET has 1~3 orders of magnitude higher than that of SOI p-MOSFET. Because Ge alloy mole fraction is an important basic parameter to the strained SiGe channel MOSFET, the effect of Ge alloy mole fraction on the electrical characteristics of the SGOI p-MOSFET is in depth study in this paper. With the increasing of Ge alloy mole fraction, the overall electrical properties of SGOI p-MOSFET are improved.The strained SiGe-on-Insulator (SGOI) p-MOSFET and Si-on-Insulator (SOI) p-MOSFET were studied via 2-D numerical simulation by ISE TCAD software, respectively. The results indicate that the drain-source saturation current of SGOI p-MOSFET is almost more than twice that of conventional SOI p-MOSFET. The sub-threshold current of SGOI p-MOSFET is 1~3 orders of magnitude higher than that of SOI p-MOSFET. Because Ge alloy mole fraction is an important parameter for the strained SiGe channel MOSFET, its effect on the electrical characteristics of the SGOI p-MOSFET was studied in detail. With the increasing of Ge alloy mole fraction, the overall electrical properties of SGOI p-MOSFET were improved.

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YU Jie, WANG Chong, YANG Zhou, CHEN Xiao-Shuang, YANG Yu. Simulation analysis of electrical characteristics of strained SiGe channel-on-insulator p-MOSFET[J]. Journal of Infrared and Millimeter Waves,2013,32(4):304~308

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History
  • Received:August 28,2012
  • Revised:April 01,2013
  • Adopted:November 09,2012
  • Online: August 29,2013
  • Published: