Fabrication of array of one-dimensional porous silicon photonic crystal
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Qiqihar University,Qiqihar University,Shanghai Institute of Technical Physics

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    Abstract:

    With the aid of photolithography, arrays of one-dimensional porous silicon photonic crystal with the middle infrared mid-gap (λ=5、6、7、10 μm) were fabricated successfully by the combination of microelectronic technique and the electrochemical etching method. For practical use, the roughness of the surface was improved by deposited a Si3N4 thin film with 5000 ?. Then their optical and roughness properties were characterized by FTIR and AFM, respectively. As a result of the synergetic effects rendered by heat isolation and high reflection properties, the array of the one-dimensional porous silicon photonic crystal exhibit feasibility as the substrate for pyroelectric infrared sensor.

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MIAO Feng-Juan, TAO Bai-Rui, CHU Jun-Hao. Fabrication of array of one-dimensional porous silicon photonic crystal[J]. Journal of Infrared and Millimeter Waves,2012,31(4):311~313

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History
  • Received:August 17,2011
  • Revised:February 26,2012
  • Adopted:October 10,2011
  • Online: August 27,2012
  • Published:
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