一种基于3D打印透镜封装的宽带太赫兹准光探测器
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1.北京理工大学;2.北京傲图科技有限公司

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国家自然科学基金项目(面上项目,重点项目,重大项目)


A broadband terahertz quasi-optical detector based on 3D-printed lens packaging
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Affiliation:

1.Beijing Institute of Technology;2.Beijing Altos Radar CO., LTD.

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National Natural Science Foundation of China

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    摘要:

    本文提出了一种基于3D打印透镜封装的宽带太赫兹(THz)准光探测器, 可覆盖220 GHz和340 GHz两个典型大气窗口. 该探测器由天线耦合探测芯片和3D打印透镜组成. 天线耦合探测芯片通过多层介质衬底封装, 肖特基二极管直接集成在片上天线的馈电端口. 片上集成的平面蝶形天线图案刻蚀在石英基底上, 工作频率范围为201–405 GHz, 兼具辐射器与射频(RF)扼流的功能. 该天线引入容性负载环路(CLL)以拓展工作带宽, 同时基本保持整体尺寸不变. 此外, 设计了高阻抗折叠的低频(LF)引线, 以实现有效的信号隔离和辐射耦合特性. 提出了一种低成本, 轻量化的3D打印透镜, 该透镜与埋置于多层介质层压板中的金属化反射器相结合, 实现天线定向辐射并增强整体结构的机械稳定性. 该探测器在200–230 GHz范围内的最大电压响应度为2200 V/W, 在320–350 GHz范围内的最大电压响应度为1885 V/W, 实测辐射方向图与仿真结果表现出较好的一致性.

    Abstract:

    A broadband terahertz (THz) quasi-optical detector based on 3D-printed lens packaging has been presented, covering two typical atmospheric windows at 220 GHz and 340 GHz. The detector consists of an antenna-coupled detector chip and a 3D-printed lens. The antenna-coupled detector chip was packaged on the multi-layer dielectric laminate with the Schottky diode directly integrated across feeding terminals of the chip-on antenna. Patterns of the on-chip integrated broadband planar bowtie antenna were printed on a quartz substrate within the frequency range of 201-405 GHz, serving as a radiator and a radio frequency (RF) choke. It utilized a pair of capacitively loaded loop (CLL) to broaden the operational bandwidth, while essentially maintaining the overall antenna dimensions. Additionally, well-designed high-impedance folded low-frequency (LF) leads were integrated for achieving effective signal isolation and radiation coupling characteristics. To achieve unidirectional antenna radiation patterns and enhance the overall structural mechanical robustness, a lightweight and lost-cost 3D-printed lens combined with metallized reflector buried in multi-layer dielectric laminate was proposed. The detector exhibits a maximum voltage responsivity of 2200 V/W in the 200-230 GHz range, and 1885 V/W in the 320-350 GHz range. The measured radiation patterns show good agreement with the simulated results.

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  • 收稿日期:2025-08-27
  • 最后修改日期:2025-10-10
  • 录用日期:2025-10-14
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