512×2元InGaAs光谱传感物联网节点研制
作者:
作者单位:

1.中国科学院上海技术物理研究所 传感技术联合国家重点实验室,上海 200083;2.中国科学院上海技术物理研究所 中国科学院红外成像材料与器件重点实验室,上海 200083;3.中国科学院大学,北京 100049;4.上海科技大学,上海 201210

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中图分类号:

TN216

基金项目:

国家自然科学基金面上项目(62075229),安徽省科技重大专项(S202003a06020001),传感技术联合国家重点实验室开放课题(SKT1907),红外物理国家重点实验室开放课题(M201901)。


Development of 512 × 2-element InGaAs spectral sensor IoT node
Author:
Affiliation:

1.State Key Laboratories of Transducer Technology , Shanghai Institute of Technical Physics , Chinese Academy of Sciences,Shanghai 200083 , China;2.Key Laboratory of Infrared Imaging Materials and Detectors , Shanghai Institute of Technical Physics , Chinese Academy of Sciences , Shanghai 200083 , China;3.University of Chinese Academy of Sciences , Beijing 100049 , China;4.Shanghai Tech University , Shanghai 201210 , China

Fund Project:

Supported by The General Program of National Natural Science Foundation of China (62075229),Science and Technology Major Project of the Ministry of Science and Technology of Anhui Province (s202003a0620001),Open project of State Key Laboratories of Transducer Technology (SKT1907), and the Open project of State Key Laboratory of Infrared Physics(M201901)

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    摘要:

    基于512×2元InGaAs光谱组件研制一款新型光谱传感物联网节点。针对中心距为25 μm的双列小像元探测器结构,在信号处理电路中对双通道数据进行均值处理,减小了单个光敏元响应异常对系统测试结果带来的影响。实验结果表明,此节点的测试波长范围为976~1700 nm,光谱分辨率达到13.5 nm,波长准确性优于3.2 nm,波长重复性优于0.3 nm,动态范围达到2300:1,吸光度重复性0.0011 AU,光源基线稳定性优于0.0001 A/h。采用多种标称酒精浓度的酒类样本对此光谱传感节点进行测试,验证其功能。

    Abstract:

    Based on a 512 × 2-element InGaAs spectrum module, a new spectral-sensing IoT node is developed. The detector uses two parallel column structure with 25 μm pixel pitch. In order to reduce the impact on an abnormal response to a single pixel, the data onto two channels is averaged in the circuit. The experimental results show that the test wavelength range of this node is 976~1700 nm, and the spectral resolution is 13.5 nm. The wavelength accuracy is better than 3.2 nm, and the wavelength repeatability is better than 0.3 nm. The dynamic range is 2300:1, and the absorbance repeatability is 0.0011 AU. The baseline stability of light source is better than 0.0001 A/h. The function of the sensor node was verified by using alcoholic beverages samples of different nominal concentrations.

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柯鹏瑜,刘梦璇,王绪泉,黄松垒,张永刚,方家熊.512×2元InGaAs光谱传感物联网节点研制[J].红外与毫米波学报,2021,40(5):582~588]. KE Peng-Yu, LIU Meng-Xuan, WANG Xu-Quan, HUANG Song-Lei, ZHANG Yong-Gang, FANG Jia-Xiong. Development of 512 × 2-element InGaAs spectral sensor IoT node[J]. J. Infrared Millim. Waves,2021,40(5):582~588.]

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  • 收稿日期:2020-10-27
  • 最后修改日期:2021-07-12
  • 录用日期:2021-01-06
  • 在线发布日期: 2021-09-07
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