脉冲激光沉积法制备的单层MoS2薄膜变温光响应研究
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1.华东师范大学 物理与电子科学学院,材料科学系,纳光电集成与先进装备教育部工程研究中心,上海市极化材料多功能磁光光谱技术服务平台,上海 200241;2.复旦大学 上海智能电子与系统研究院,上海 200433

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O43

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Temperature-dependent photoresponse of monolayer MoS2 film grown by pulsed laser deposition
Author:
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1.Technical Center for Multifunctional Magneto-Optical Spectroscopy (Shanghai), Engineering Research;Center of Nanophotonics & Advanced Instrument (Ministry of Education), Department of Materials, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China;2.Shanghai Institute of Intelligent Electronics & Systems, Fudan University, Shanghai 200433, China

Fund Project:

Supported by the National Key R&D Program of China (2018YFB0406500 , 2019YFB2203400); the Natural Science Foundation of China (91833303,61974043,61674057); Projects of Science and Technology Commission of Shanghai Municipality (18JC1412400, 18YF1407200,18YF1407000,19511120100).

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    摘要:

    报导了在c-Al2O3衬底上用脉冲激光沉积法制备MoS2薄膜,并测试了其不同温度下的光响应。通过拉曼散射光谱和X射线衍射光谱证明了所制备的二硫化钼为纯2H相。通过X光电子能谱证明了所制备的二硫化钼硫钼原子比为1.92:1,在Mo元素的3d核心能级谱中存在红移和蓝移,说明薄膜中存在氧化和硫缺陷。此外,通过拉曼和光致发光分布图,证明了薄膜具有良好的均一性。在不同层数的二硫化钼样品中,单层二硫化钼样品具有最强的光响应,达到3 mAW-1。单层二硫化钼的变温光响应实验表明,在室温附近,温度升高会提高二硫化钼的光响应强度和响应时间。

    Abstract:

    We report the preparation and photoresponse of MoS2 films with different layers grown on c-Al2O3 by pulsed laser deposition (PLD). The phonon modes and crystallographic orientation discussed by Raman scattering and X-ray diffraction (XRD) prove that the MoS2 films are of pure 2H-phase. The S/Mo ratio of film is identified as 1.92:1 derived by X-ray photoelectron (XPS) experiments. The blue and red shifts of the Mo 3d peaks for XPS data indicate the existence of oxidation and sulfur defects in the films. Moreover, by Raman and photoluminescence (PL) mapping, the film thickness is proven to be uniform. The temperature-dependent photoresponse of monolayer MoS2 film indicates that the temperature plays an important role in the photoresponse intensity and response time. The present results can provide a reference for further improving the performance of MoS2-based photodetectors.

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谢明章,李留猛,李明,叶艳,张金中,姜凯,商丽燕,胡志高,褚君浩.脉冲激光沉积法制备的单层MoS2薄膜变温光响应研究[J].红外与毫米波学报,2021,40(3):302~307]. XIE Ming-Zhang, LI Liu-Meng, LI Ming, YE Yan, ZHANG Jin-Zhong, JIANG Kai, SHANG Li-Yan, HU Zhi-Gao, CHU Jun-Hao. Temperature-dependent photoresponse of monolayer MoS2 film grown by pulsed laser deposition[J]. J. Infrared Millim. Waves,2021,40(3):302~307.]

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历史
  • 收稿日期:2020-08-02
  • 最后修改日期:2021-05-20
  • 录用日期:2020-09-25
  • 在线发布日期: 2021-04-27
  • 出版日期: 2021-06-25