3- 中红外偏振无关且CMOS兼容的石墨烯调制器
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作者单位:

1.电子薄膜与集成器件国家重点实验室,光电科学与工程学院,电子科技大学,四川 成都 610054;2.重庆微电子中心,重庆 401332

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中图分类号:

O43

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3- mid-infrared polarization-independent and CMOS-compatible graphene modulator
Author:
Affiliation:

1.State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China;2.Chongqing United Microelectronics Center, Chongqing 401332, China

Fund Project:

Supported by the National Key Research and Development Program of China(2018YFE0201901);the Program for International S&T Cooperation Projects of Sichuan Province(2020YFH0108); the National Nature Science Foundation of China (61435010, 61307070, 61421002, 61704021); the Fundamental Research Funds for the Central Universities (ZYGX2019J046).

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    摘要:

    文章提出了一种3-中红外波段偏振无关且CMOS兼容的石墨烯调制器,器件主要包括两部分:模式转换结构及石墨烯调制器。该调制器不仅满足于CMOS兼容的要求,而且能够实现基膜的偏振无关调制。仿真结果表明该调制器在2.95 到3.05 的中红外波段能够实现高于20 dB的消光比,TE和TM模式的插入损耗都低于1.3 dB,其偏振相关损耗低于1.09 dB。通过计算,当器件长度为420 ,能够获得高达9.47 GHz的3 dB带宽。

    Abstract:

    This paper proposes a 3- mid-infrared band polarization-independent and CMOS-compatible graphene modulator, which mainly includes two parts: the mode conversion structure and the graphene modulator. This modulator not only fulfills the requirement of compatibility with CMOS, but also can achieve polarization-independent modulation of the fundamental mode. Simulation results show that this modulator can achieve an extinction ratio(ER) higher than 20 dB in the mid-infrared band from 2.95 to 3.05 , the insert loss for both TE and TM modes are less than 1.3 dB, and polarization-dependent loss is less than 1.09 dB. Through the calculation, the 3 dB bandwidth up to 9.47 GHz can be obtained when the length of the device is 420 .

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陆荣国,林瑞,沈黎明,蔡松炜,王玉姣,陈进湛,杨忠华,吕江泊,周勇,王小菊,刘永.3- 中红外偏振无关且CMOS兼容的石墨烯调制器[J].红外与毫米波学报,2021,40(3):297~301]. LU Rong-Guo, LIN Rui, SHEN Li-Ming, CAI Song-Wei, WANG Yu-Jiao, CHEN Jin-Zhan, YANG Zhong-Hua, LYU Jiang-Bo, ZHOU Yong, WANG Xiao-Ju, LIU Yong.3- mid-infrared polarization-independent and CMOS-compatible graphene modulator[J]. J. Infrared Millim. Waves,2021,40(3):297~301.]

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历史
  • 收稿日期:2020-07-28
  • 最后修改日期:2021-04-29
  • 录用日期:2020-09-04
  • 在线发布日期: 2021-04-27
  • 出版日期: 2021-06-25