高量子效率中波InAs/GaSb II类超晶格探测器分子束外延生长及特性
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作者单位:

1.中国科学院上海技术物理研究所 中国科学院红外成像材料与器件重点实验室,上海 200083;2.中国科学院大学,北京 100049

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TN304.2;O484.1

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Molecular beam epitaxy growth and characteristics of the high quantum efficiency InAs/GaSb type-II superlattices MWIR detector
Author:
Affiliation:

1.Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2.University of Chinese Academy of Sciences, Beijing 100049, China

Fund Project:

Supported by the National Natural Science Foundation of China (NSFC) (61904183, 61974152, 61534006, 61505237, 61505235), the National Key Research and Development Program of China (2016YFB0402403), the Youth Innovation Promotion Association, CAS (2016219), and the Fund of Shanghai Science and Technology Foundation (16JC1400403).

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    摘要:

    基于分子束外延(MBE)生长技术获得了高量子效率的InAs/GaSb T2SLs中波红外(MWIR)光电探测器结构材料,表现出了层状结构生长的光滑表面和出色的晶体结构均匀性。此超晶格中波红外探测器的50%截止波长约为5.5 μm,峰值响应率为2.6 A/W,77 K下量子效率超过了80%,与碲镉汞的量子效率相当。在77 K,-50 mV偏压下的暗电流密度为1.8×10-6 A/cm2,最大电阻面积乘积(RA)(-50 mV偏压)为3.8×105Ω·cm2,峰值探测率达到了6.1×1012 cm Hz1 / 2/W。

    Abstract:

    A very high quantum efficiency InAs/GaSb T2SL mid-wavelength infrared (MWIR) photodetector has been grown by molecular beam epitaxy (MBE). The T2SL detector structure material exhibited smooth surface with step-flow growth and excellent structural homogeneity. The 50% cut-off wavelength was about 5.5 μm. The peak current responsivity was 2.6 A/W corresponding to a quantum efficiency over 80% at 77 K, which was comparable to that of MCT. At 77 K, the dark current density at -50 mV bias was 1.8×10-6 A/cm2 and the resistance-area product (RA) at maximum (-50 mV bias) was 3.8×105 Ω·cm2. The peak detectivity was calculated to be 6.1 × 1012 cm Hz1/2/W.

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陈凯豪,徐志成,梁钊铭,朱艺红,陈建新,何力.高量子效率中波InAs/GaSb II类超晶格探测器分子束外延生长及特性[J].红外与毫米波学报,2021,40(3):285~289]. CHEN Kai-Hao, XU Zhi-Cheng, LIANG Zhao-Ming, ZHU Yi-Hong, CHEN Jian-Xin, HE Li. Molecular beam epitaxy growth and characteristics of the high quantum efficiency InAs/GaSb type-II superlattices MWIR detector[J]. J. Infrared Millim. Waves,2021,40(3):285~289.]

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  • 收稿日期:2020-05-29
  • 最后修改日期:2021-05-11
  • 录用日期:2020-06-17
  • 在线发布日期: 2021-04-27
  • 出版日期: 2021-06-25