面向长距离通讯1550 nm垂直腔面发射激光器的研究
作者:
作者单位:

1.中国科学院半导体研究所 集成光电子学国家重点实验室, 北京 100083;2.中国科学院大学 材料科学与光电技术学院,北京 100049;3.中国科学院半导体研究所 材料重点实验室,北京 100083

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中图分类号:

TN248.4

基金项目:


1550 nm VCSELs for long-reach optical interconnects
Author:
Affiliation:

1.State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083,China;2.College of Material Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049,China;3.Key Laboratory of Semiconductor Materials Science and Beijing Key Laboratory of Low-Dimensional Semiconductor Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Fund Project:

Research Project of Xian Polytechric University 107020492;National Natural Science Foundation of China 51905405;Natural Science Basic Research Plan in Shannxi Province of China 2019JQ-855Supported by Research Project of Xian Polytechric University (107020492) National Natural Science Foundation of China (51905405),Natural Science Basic Research Plan in Shannxi Province of China (2019JQ-855)

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    摘要:

    采用InP基衬底设计并制备了1550 nm垂直腔面发射激光器。采用混合镜面布拉格发射镜,其中顶部采用4.5对硅和二氧化硅的介电布拉格反射镜,同时采用隧道结的方式降低p层载流子吸收。制备出阈值电流在20 mA,室温直流下输出光功率为7 μW,激射波长为1554 nm,激射谱半高宽为3 nm的垂直腔面发射激光器。

    Abstract:

    Long-wavelength VCSELs on an InP substrate was designed and fabricated with an active layer of 1550 nm. The top Distributed Bragg Reflection (DBR) mirror system has been constructed by fabricating 4.5 pairs of SiO2/Si top DBRs. The threshold current was 20 mA and maximum output power around 7 μW under continuous wave (CW) operation at room temperature. More importantly, the lasing spectrum is 1554 nm and the full width at half maximum is 3 nm.

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引用本文

刘丽杰,吴远大,王玥,王亮亮,安俊明,赵有文.面向长距离通讯1550 nm垂直腔面发射激光器的研究[J].红外与毫米波学报,2020,39(4):397~400]. LIU Li-Jie, WU Yuan-Da, WANG Yue, WANG Liang-Liang, An Jun-Ming, ZHAO You-Wen.1550 nm VCSELs for long-reach optical interconnects[J]. J. Infrared Millim. Waves,2020,39(4):397~400.]

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历史
  • 收稿日期:2019-11-12
  • 最后修改日期:2020-07-24
  • 录用日期:2020-02-28
  • 在线发布日期: 2020-07-23
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