InAs/GaAsSb带间级联中波红外焦平面研究
作者:
作者单位:

1.中国科学院上海技术物理研究所 红外成像材料与器件重点实验室,上海 200083;2.中国科学院大学,北京;100049

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中图分类号:

TN304.2;TN305

基金项目:

国家重点研发计划 2016YFB0402403;国家自然科学基金 61974152 61904183 61534006 61505237 61505235;中国科学院青年创新促进会会员资助 2016219国家重点研发计划(2016YFB0402403),国家自然科学基金(61974152, 61904183, 61534006, 61505237, 61505235),中国科学院青年创新促进会会员资助(2016219)


Studies on InAs/GaAsSb mid-wavelength interband cascade infrared focal plane arrays
Author:
Affiliation:

1.Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2.University of Chinese Academy of Science, Beijing 100049, China

Fund Project:

the National Key Research and Development Program of China 2016YFB0402403;National Natural Science Foundation of China (NSFC 61974152;61904183, 61534006, 61505237, 61505235), and the Youth Innovation Promotion Association 2016219Supported by the National Key Research and Development Program of China (2016YFB0402403), National Natural Science Foundation of China (NSFC 61974152, 61904183, 61534006, 61505237, 61505235), and the Youth Innovation Promotion Association(2016219)

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    摘要:

    针对高工作温度红外探测器的迫切需求,设计并利用分子束外延技术制备了高晶格质量的2级带间级联中波红外探测材料,带间级联单元器件在最高323 K下可以测试到清晰的响应光谱,140 K下暗电流密度达到4×10-5 A/cm-2.并在此基础上利用干法刻蚀技术实现了320×256规模的台面型带间级联红外焦平面原型器件.焦平面测试结果表明其在80~120 K范围内量子效率达到30%,127 K下噪声等效温差为55.1 mK,盲元率为2.3%.采用该焦平面器件在127 K下获得了较为清晰的演示性室温目标红外热成像.

    Abstract:

    Mid-wavelength infrared interband cascade photodetectors (ICIP) for high operation temperature applications were designed and grown in molecular beam epitaxy (MBE) system. Clear optical response was measured even at a temperature of 323 K, and the dark current density was 4×10-5 A/cm-2 at 140 K for single element device. Based on great material quality of the two-stage ICIP, 320×256 focal plane arrays (FPA) were demonstrated using dry etching. The FPA has a quantum efficiency of 30% from 80 K to 120 K. At 127 K, the device has a noise equivalent temperature difference (NETD) of 55.1 mK and dead pixel rate of 2.3%. Clear infrared images have been taken for a room temperature target with the focal plane arrays at 127 K.

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周易,柴旭良,田源,徐志成,黄敏,许佳佳,黄爱波,白治中,陈红雷,丁瑞军,陈建新,何力. InAs/GaAsSb带间级联中波红外焦平面研究[J].红外与毫米波学报,2019,38(6):745~750]. ZHOU Yi, CHAI Xu-Liang, TIAN Yuan, XU Zhi-Cheng, HUANG Min, XU Jia-Jia, HUANG Ai-Bo, BAI Zhi-Zhong, CHEN Hong-Lei, DING Rui-Jun, CHEN Jian-Xin, HE Li. Studies on InAs/GaAsSb mid-wavelength interband cascade infrared focal plane arrays[J]. J. Infrared Millim. Waves,2019,38(6):745~750.]

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  • 收稿日期:2019-04-15
  • 最后修改日期:2019-11-19
  • 录用日期:2019-05-17
  • 在线发布日期: 2019-12-17
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