硅晶闸管烧结应力的红外光弹性研究
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TN340.7

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广东省自然科学基金


INFRARED PHOTOELASTIC RESEARCH OF SINTERING STRESS IN SILICON THYRISTOR
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    摘要:

    参考热弹性理论和复合材料层间应力理论,研究了Si片Al箔/Mo片烧结后的层间应力及硅片中的应力,热膨性能不同引起的热应力成硅片中的中间和边缘区域分布情况不一样,推导出适用于边级区域的应力计算表达式,用红外光弹测量获得晶闸管烧结工艺制备样品的应力分布光弹图,理论能较好地解释实验结果。

    Abstract:

    By referring to the theories of thermoelasticity and thermal interlaminar stress of composite, the stress in silicon wafer and the interlaminar stress of structure Si/Al/Mo used for making thyristor after sintering were analyzed. It was found that the distribution of stress caused by different properties of thermal expansion in the center portion is different from that at the edge of silicon wafer. The expression for stress at the edge of silicon wafer was derived. The stress photoelastic patterns were obtained by means of the infrared photoelastic system. The theory coincides well with the results of experiment.

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彭海鲸 赵寿南.硅晶闸管烧结应力的红外光弹性研究[J].红外与毫米波学报,1998,17(1):42~47]. PENG Hai Jing ZHAO Shou Nan. INFRARED PHOTOELASTIC RESEARCH OF SINTERING STRESS IN SILICON THYRISTOR[J]. J. Infrared Millim. Waves,1998,17(1):42~47.]

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  • 最后修改日期:1997-04-15
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