The structure perfection of infrared materials of (CdTes-ZnTe)/ZnTe superlattices grown on GaAs (001) by atomic layer epitaxy was investigated by X-ray diffraction (XRD), combined with the analysis of kinematical X-ray diffraction theory and computer simulation of dynamical X-ray diffraction theory. The structure parameters were obtained for the simple and the complex structures of superlattices.