基于金属-半导体-金属结构的Bi2Te3室温高响应率太赫兹探测器
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1.东华大学 理学院 应用物理系,上海 201620;2.中国科学院上海技术物理研究所 红外物理国家重点实验室,上海 200083;3.中国科学院大学,北京 100049;4.上海智能电子与系统研究所,上海 201620

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基金项目:

国家自然科学基金 61625505 61604160;上海市自然科学基金 16JC1403400 17ZR1444100 17ZR1411500国家自然科学基金(61625505,61604160);上海市自然科学基金(16JC1403400。17ZR1444100,17ZR1411500)


High responsivity Bi2Te3-based room temperature terahertz detector based on metal-semiconductor-metal (MSM) structure
Author:
Affiliation:

1.Department of Applied Physics, College of Science, DongHua University, Shanghai 201620, China;2.State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;3.University of Chinese Academy of Sciences, Beijing 100049, China;4.Shanghai Institute of Intelligent Electronics and Systems, Shanghai 201620, China

Fund Project:

the National Natural Science Foundation of China 61571011 61302148Supported by the National Natural Science Foundation of China (61571011, 61302148)

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    摘要:

    基于二维拓扑绝缘体Bi2Te3材料利用微纳工艺制备了金属-拓扑绝缘体-金属(MTM)结构的太赫兹光电探测器。器件在0.022 THz的响应率可达2×103 A/W,噪声等效功率(NEP)低于7.5×10-15 W/Hz1/2,探测率D*高于1.62 ×1011 cm?Hz1/2/W;在0.166 THz的响应率可达281.6 A/W,NEP低于5.18×10-14 W/Hz1/2,D*高于2.2×1010 cm?Hz1/2/W;在0.332 THz的响应率可达7.74 A/W,NEP低于1.75×10-12 W/Hz1/2,D*高于6.7 ×108 cm?Hz1/2/W;同时器件在太赫兹波段具有7~8 μs小的时间常数。该项工作突破了传统光子探测的带间跃迁,实现了可室温工作、高响应率、高速响应以及高灵敏度的太赫兹探测器件。

    Abstract:

    In this study, a metal-topological insulator-metal (MTM) structure terahertz photodetector was fabricated based on a two-dimensional topological insulator Bi2Te3 material using a micro-nano process. The responsivity of device reaches 2×103 A/W at 0.02 THz, the noise equivalent power (NEP) is lower than 7.5×10-15 W/Hz1/2, and the detectivity D* is higher than 1.62 ×1011 cm?Hz1/2 /W; The responsivity is up to 281.6 A/W at 0.166 THz, NEP is lower than 5.18×10-14 W/Hz1/2, D* is higher than 2.2×1010 cm?Hz1/2/W; The responsivity is up to 7.74 A/W at 0.332 THz, NEP is lower than1.75×10-12 W/Hz1/2, D* is higher than 6.7×108 cm?Hz1/2 /W; at the same time, the response time of device has 7~8 μs in the terahertz band. This work breaks through the inter-band transition of traditional photon detection, and realizes terahertz detectors with room temperature operation, high response rate, high speed response and high sensitivity.

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徐新月,张晓东,吴敬,江林,吴彩阳,姚娘娟,曲越,周炜,尹一鸣,黄志明.基于金属-半导体-金属结构的Bi2Te3室温高响应率太赫兹探测器[J].红外与毫米波学报,2019,38(4):459~463]. XU Xin-Yue, ZHANG Xiao-Dong, WU Jing, JIANG Lin, WU Cai-Yang, YAO Niang-juan, QU Yue, ZHOU Wei, YIN Yi-Ming, HUANG Zhi-Ming. High responsivity Bi2Te3-based room temperature terahertz detector based on metal-semiconductor-metal (MSM) structure[J]. J. Infrared Millim. Waves,2019,38(4):459~463.]

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  • 收稿日期:2018-12-12
  • 最后修改日期:2018-12-20
  • 录用日期:2018-12-25
  • 在线发布日期: 2019-09-06
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