高边缘击穿和扩展光谱的圆形单光子雪崩二极管
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1.湘潭大学 物理与光电工程学院,湖南 湘潭411105;2.湖南师范大学 物理与电子科学学院,湖南 长沙410081;3.上海大学 机电工程与自动化学院,上海200444

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Circular single-photon avalanche diode withhigh premature edge breakdown and extended spectrum
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1.School of Physics and Optoelectronics, Xiangtan University, Xiangtan 411105,China;2.School of Physics and Electronics, Hunan Normal University, Changsha 410081,China;3.School of Mechatronic Engineering and Automation,Shanghai University, Shanghai 200444, China

Fund Project:

National Natural Science Foundation of China 61774129 61827812 61704145;Changsha Science and Technology Project kq1801035Supported by National Natural Science Foundation of China (61774129, 61827812, 61704145),and Changsha Science and Technology Project(kq1801035).

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    摘要:

    介绍了一种0.18 μm互补金属氧化物半导体(CMOS)技术的新型宽光谱荧光相关谱探测器,其为高边缘击穿、扩展光谱和低暗计数率圆形单光子雪崩二极管(SPAD)。该器件由p+/deep n-well结,p-well保护环和多晶硅保护环组成。通过Silvaco TCAD 3D器件仿真,直径为10 μm的圆形p+/deep n-well SPAD器件具有较高边缘击穿特性。此外,p+/deep n-well结SPAD比p+/n-well结SPAD具有更长的波长响应和扩展光谱响应范围。该器件在0.5 V过量偏压下,可在490~775 nm波长范围内实现超过40%的光子探测率。该圆形p+/deep n-well SPAD器件在25℃时具有较好雪崩击穿为15.14 V,具有较低暗计数率为638 Hz。

    Abstract:

    This paper presents a 0.18 μm complementary metal-oxide-semiconductor (CMOS) technology high premature edge breakdown, extended spectrum and low dark count rate circular single-photon avalanche diode (SPAD) which together form a novel wide spectrum fluorescence correlation spectroscopy (FCS) detector. The circular device consists of a p+/deep n-well junction, a p-well guard-ring, and a poly guard-ring. Simulations on a Silvaco TCAD 3D device also show that the 10 μm-diameter circular p+/deep n-well SPAD device has high premature edge breakdown characteristics. Moreover,compared to the SPAD p+/n-well junction, the p+/deep n-well junction has a longer wavelength response and spectral expansion. The device achieves wide spectral sensitivity enabling greater than 40% photon detection probability from 490 to 775 nm wavelength at 0.5 V excess bias. The circular p+/deep n-well SPAD has fine avalanche breakdown is 15.14 V and a low dark count rate of 638 Hz at 25℃.

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金湘亮,曾朵朵,彭亚男,杨红姣,蒲华燕,彭艳,罗均.高边缘击穿和扩展光谱的圆形单光子雪崩二极管[J].红外与毫米波学报,2019,38(4):403~407]. JIN Xiang-Liang, ZENG Duo-Duo, PENG Ya-Nan, YANG Hong-Jiao, PU Hua-Yan, PENG Yan, LUO Jun. Circular single-photon avalanche diode withhigh premature edge breakdown and extended spectrum[J]. J. Infrared Millim. Waves,2019,38(4):403~407.]

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历史
  • 收稿日期:2018-12-06
  • 最后修改日期:2019-05-24
  • 录用日期:2019-01-28
  • 在线发布日期: 2019-09-06
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