基于60 nm T型栅fT & fmax为170 & 210 GHz 的InAlN/GaN HFETs 器件
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河北半导体研究所 专用集成电路国家级重点实验室,河北半导体研究所,河北半导体研究所,河北半导体研究所,河北半导体研究所,河北半导体研究所,河北半导体研究所,河北半导体研究所,河北半导体研究所

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国家自然科学青年基金项目


60 nm T-shaped-gate InAlN/GaN HFETs with fT & fmax of 170 & 210 GHz
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National Key Laboratory of Application Specific Integrated Circuit(ASIC), Hebei Semiconductor Research Institute,National Key Laboratory of Application Specific Integrated Circuit(ASIC), Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute

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    摘要:

    基于蓝宝石衬底InAlN/GaN异质结材料研制具有高电流增益截止频率(fT)和最大振荡频率(fmax)的InAlN/GaN异质结场效应晶体管 (HFETs).基于再生长n+ GaN欧姆接触工艺实现了器件尺寸的缩小, 有效源漏间距(Lsd)缩小至600 nm.此外, 采用自对准栅工艺制备60 nm T型栅.由于器件尺寸的缩小, 在Vgs= 1 V时, 器件最大饱和电流(Ids)达到1.89 A/mm, 峰值跨导达到462 mS/mm.根据小信号测试结果, 外推得到器件的fT和fmax分别为170 GHz和210 GHz, 该频率特性为国内InAlN/GaN HFETs器件频率的最高值.

    Abstract:

    Scaled InAlN/GaN heterostructure field-effect transistors (HFETs) on sapphire substrate with high unity current gain cut-off frequency (fT) and maximum oscillation frequency (fmax) were fabricated and characterized. In the device, scaled source-to-drain distance (Lsd) of 600 nm was realized by employing nonalloyed regrown n+-GaN Ohmic contacts. Moreover, a 60-nm T-shaped gate was fabricated by self-aligned-gate technology. A high drain saturation current density (Ids) of 1.89 A/mm @ Vgs= 1 V and a peak extrinsic transconductance (gm) of 462 mS/mm were obtained in the scaled InAlN/GaN HFETs. In addition, from the small-signal RF measurements, the values of fT and fmax for the device with 60-nm gate were extrapolated to be 170 GHz and 210 GHz at the same bias. To our knowledge, they are the highest values of fT and fmax for the domestic InAlN/GaN HFETs.

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吕元杰,冯志红,张志荣,宋旭波,谭鑫,郭红雨,尹甲运,房玉龙,蔡树军.基于60 nm T型栅fT & fmax为170 & 210 GHz 的InAlN/GaN HFETs 器件[J].红外与毫米波学报,2016,35(6):641~645]. LV Yuan-Jie, FENG Zhi-Hong, ZHANG Zhi-Rong, SONG Xu-Bo, TAN Xin, GUO Hong-Yu, YIN Jia-Yun, FANG Yu-Long, CAI Shu-Jun.60 nm T-shaped-gate InAlN/GaN HFETs with fT & fmax of 170 & 210 GHz[J]. J. Infrared Millim. Waves,2016,35(6):641~645.]

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  • 收稿日期:2016-01-02
  • 最后修改日期:2016-06-20
  • 录用日期:2016-06-24
  • 在线发布日期: 2016-12-06
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