钛掺杂对Ge2Sb2Te5薄膜相变特性的改善
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复旦大学,复旦大学,复旦大学,复旦大学,复旦大学,复旦大学,复旦大学

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Grant Nos. 13ZR1402600, 60578047, 2012CB934303, 2009CB929201, 06DJ14007,2011ZX02402 and 2011ZRFL019.


Improvement of phase change behavior in titanium-doped Ge2Sb2Te5 films
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Fudan University,Fudan University,Fudan University,Fudan University,Fudan University,Fudan University,Fudan University

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    摘要:

    利用椭偏光谱术与XRD对钛掺杂Ge2Sb2Te5薄膜中钛元素对体系的光学性质及其微结构的影响进行了实验研究.进而对该薄膜进行变温阻抗实验表明,钛掺杂Ge2Sb2Te5薄膜与未掺杂的薄膜相比具有更好的热稳定性.基于对薄膜样品的数据保持能力测试的实验数据,经阿伦纽斯外推处理可知,钛掺杂Ge2Sb2Te5薄膜样品的10年数据保持温度要高于未掺杂Ge2Sb2Te5薄膜样品.本文的实验结果均证实,钛掺杂Ge2Sb2Te5薄膜更适合应用于相变随机存取存储器中.

    Abstract:

    The influence of Ti dopant in the titanium-doped Ge2Sb2Te5 film upon its optical and structural characteristics has been investigated by spectroscopic ellipsometry and x-ray diffraction. Temperature-dependent resistance tests have further revealed that Ti-doped Ge2Sb2Te5 films have better thermal stability than undoped one. Based on the Arrhenius extrapolation results from data retention tests, the endurance temperature corresponding to 10-year data retention of a Ti-doped Ge2Sb2Te5 cell is higher than that of a common Ge2Sb2Te5 cell without dopant. All these experimental results have confirmed that the Ti-doped Ge2Sb2Te5 films are more suitable for the application in phase-change random access memory.

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张颖,魏慎金,易歆雨,程帅,陈坤,朱焕锋,李晶,吕磊.钛掺杂对Ge2Sb2Te5薄膜相变特性的改善[J].红外与毫米波学报,2015,34(6):658~662]. ZHANG Ying, WEI Shen-Jin, YI Xin-Yu, CHENG Shuai, CHEN Kun, ZHU Huan-Feng, LI Jing, LV Lei. Improvement of phase change behavior in titanium-doped Ge2Sb2Te5 films[J]. J. Infrared Millim. Waves,2015,34(6):658~662.]

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  • 收稿日期:2015-03-18
  • 最后修改日期:2015-09-30
  • 录用日期:2015-05-27
  • 在线发布日期: 2015-12-01
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