衬底温度对硒碲铅薄膜结构及红外光学性能的影响
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国家自然科学基金项目60678058 资助项目


Influence of substrate temperature on infrared properties of lead tellurium selenide thin films
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    摘要:

    使用Bridgman法生长的PbTe0.92Se0.08材料在硅衬底上沉积硒碲铅薄膜,采用X射线衍射(XRD)、电子扫描显微术(SEM)、能量散射X射线分析(EDAX)对薄膜的结构、表面形貌和化学配比进行了分析.结果表明,沉积的硒碲铅薄膜为多晶结构,具有明显的择优取向,晶粒为矩形.衬底温度对硒碲铅薄膜的红外光学性能有明显的影响,薄膜的折射率在5.2到5.8之间,消光系数均小于0.1,在波长大于6 μm的红外光谱范围,一定衬底温度沉积的薄膜消光系数具有10-3量级.研究表明,硒碲铅材料在红外光学薄膜领域具有应用前景.

    Abstract:

    Thinfilms of lead tellurium selenide were evaporated on silicon substrates from a resource of PbTe0.92Se0.08 bulk crystal grown by Bridgman method. Xray diffraction (XRD), scanning electron microscope (SEM), and energydispersive analysis by Xray (EDAX) were used to characterize the structural and surface morphological properties, as well as chemical compositions of the thinfilms. The results indicate that thinfilms of lead tellurium selenide have a polycrystalline structure and a preferred orientation during the deposition. It was also revealed that the grains appear as rectangles. By comparison of the optical properties of the thinfilms deposited at different substratetemperatures, it was found that substrate temperature has an important effect on the infrared optical properties of thinfilms. The refractive index of the lead tellurium selenide thinfilms lies between 5.2 and 5.8, and the extinction coefficient is lower than 0.1. When the wavelength is greater than 6μm, the extinction coefficient of the thinfilms is as less as 10-3. It can be inferred that lead tellurium selenide is a potential material to be used in the infrared coatings.

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陈忠祥,李斌,张素英,谢平,刘定权,严义埙,ad.衬底温度对硒碲铅薄膜结构及红外光学性能的影响[J].红外与毫米波学报,2010,29(6):424~426]. CHEN Zhong-Xiang, Li Bin, ZHANG Su-Ying, XIE Ping, LIU Ding-Quan, YAN Yi-Xun, adf. Influence of substrate temperature on infrared properties of lead tellurium selenide thin films[J]. J. Infrared Millim. Waves,2010,29(6):424~426.]

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  • 收稿日期:2009-12-31
  • 最后修改日期:2010-06-02
  • 录用日期:2010-01-27
  • 在线发布日期: 2010-11-22
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