GaAsSb/InAlAs SACM雪崩光电探测器性能研究
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1.上海科技大学 信息科学与技术学院;2.中国科学院上海技术物理研究所

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Design and Performance Optimization of GaAsSb/InAlAs SACM Avalanche Photodiodes
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1.School of Information Science and Technology, ShanghaiTech University;2.Shanghai Institute of Technical Physics Chinese Academy of Science

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    摘要:

    本文研究了GaAsSb/InAlAs分离吸收-电荷-倍增(SACM)结构APD的光电特性。该异质结具有较小的导带偏移(=0.089eV),载流子更易注入倍增区。设计了3种不同电荷层掺杂浓度(2×1017cm-3、3×1017cm-3、4×1017cm-3)的SACM APD。实验结果表明,当电荷层掺杂浓度为4×1017cm-3时,器件性能最优,在室温下其截止波长为1.7微米,穿通电压为-10.8V,在-34.6V偏压下增益为20.3,对应暗电流密度为0.058A/cm2,与GaAsSb PIN APD器件相比,增益提升了6.8倍,暗电流得到有效降低。通过调控SACM APD电荷层掺杂浓度,抑制了器件暗电流、提升了增益,为高灵敏短波红外APD提供了新途径。

    Abstract:

    The photoelectric characteristics of a GaAsSb/InAlAs separate absorption, charge, and multiplication (SACM) structure avalanche photodiodes (APDs) were investigated in this study. This heterojunction has a relatively small conduction band offset (=0.089eV), which facilitates easier injection of carriers into the multiplication region. Three different charge layer doping concentrations (2×1017cm-3,3×1017cm-3,4×1017cm-3) of SACM APD were designed. Experimental results indicate that the device with a charge layer doping concentration of 4×1017cm-3 exhibited the best performance. At room temperature, it achieves a cutoff wavelength of 1.7 , a punch-through voltage of -10.8 V, a gain of 20.3 at a bias voltage of -34.6 V, and a corresponding dark current density of 0.058 A/cm2. Compared with the GaAsSb PIN APD device, the gain is improved by 6.8 times, and the dark current is effectively reduced. By adjusting the doping concentration of the charge layer in the SACM APD, the dark current is suppressed, and the gain is improved, providing a new approach for highly sensitive short-wave infrared APDs.

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  • 收稿日期:2026-01-04
  • 最后修改日期:2026-02-26
  • 录用日期:2026-03-01
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