1.中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083;2.中国科学院大学,北京 100049;3.复旦大学 集成电路与微纳电子创新学院,上海 200438;4.东华大学 机械工程学院,上海 201620;5.中国人民解放军32215部队,北京 100093;6.中国人民解放军32212部队,北京 100036;7.昆明物理研究所,云南 昆明 650223;8.复旦大学 光电研究院,上海 200438
国家自然科学基金项目(62025405, 62222413),国家重点研发计划(2021YFA1200700)
1.State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;2.University of Chinese Academy of Sciences,Beijing 100049,China;3.College of Integrated Circuits &4.Micro-Nano Electronics,Fudan University,Shanghai 200433,China;5.College of Mechanical Engineering, Donghua University,Shanghai 201620,China;6.Unit 32215 of PLA,Beijing 100093,China;7.Unit 32212 of PLA,Beijing 100036,China;8.Kunming Institute of Physics,Yunnan Kunming 650223,China;9.Institute of Optoelectronics, Fudan University,Shanghai 200438,China
he National key research and development program in the 14th five year plan (2021YFA1200700) ;Natural Science Foundation of China (62025405, 62222413)