This work presents the independent development of a silicon ultra-stable optical reference cavity with high-finesse. Silicon exhibits exceptional thermal stability, lower mechanical loss, and superior vibrational insensitivity. An optimized machining process effectively addresses key manufacturing challenges posed by silicon's brittleness and anisotropic properties. The three-stage polishing technology is utilized to achieve ultra-smooth surfaces with ? level roughness (RMS). The high-reflection film is produced using SiO2/Ta2O5 as the coating material via Ion Beam Sputter Deposition. A cavity linewidth measurement method demonstrates a finesse of ~340,000, comparable to top international counterparts. These results demonstrate China’s ability to independently develop high-performance silicon-based ultra-stable optical reference cavities. This advancement holds significance for precision applications like optical clocks and gravitational wave detection.