太赫兹闪耀光栅的激光自混合干涉表征技术研究
DOI:
CSTR:
作者:
作者单位:

中国科学院上海微系统与信息技术研究所

作者简介:

通讯作者:

中图分类号:

基金项目:

国家重点研发计划(2023YFB3210303);国家自然科学基金(12333012, 62435020, 62035014, 62275258);


Research on laser self-mixing interference characterization technology of terahertz blazed grating
Author:
Affiliation:

Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences

Fund Project:

the National Key R&D Program of China (2023YFB3210303), the National Natural Science Foundation of China (12333012, 62435020, 62035014, 62275258)

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    报道了一种工作于利特罗条件下的反射式闪耀光栅的设计制作及其表征与测试方法。光栅采用锯齿状结构,通过机械刻划工艺进行加工。其结构参数的表征与性能测试采用太赫兹量子级联激光器结合自混合干涉效应的方法,获得了光栅常数与闪耀角的非接触式测量,分别为84.89 μm和24.9°,并在太赫兹波段内展现出0.117 rad/THz的角分辨率和71%的最高反射效率,测试结果与理论设计基本吻合。该方法通过反馈信号直接解析光栅参数,在测量速度上有较大提升,为光栅的实时动态表征提供了新的途径。

    Abstract:

    This study presents the design, fabrication, characterization, and testing methodology of a reflective blazed grating operating in Littrow configuration. The grating, fabricated via mechanical ruling technology with a sawtooth profile, was characterized using a terahertz quantum cascade laser combined with self-mixing interferometry. Non-contact measurements yielded a grating constant of 84.89 μm and a blazed angle of 24.9°, with performance metrics including an angular resolution of 0.117 rad/THz and a peak diffraction efficiency of 71% within the terahertz band, consistent with theoretical predictions. By directly resolving grating parameters through laser feedback signals, this method significantly improved measurement speed compared to conventional approaches, demonstrating potential for real-time dynamic characterization of grating devices.

    参考文献
    相似文献
    引证文献
引用本文
相关视频

分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2025-05-22
  • 最后修改日期:2025-07-04
  • 录用日期:2025-07-07
  • 在线发布日期:
  • 出版日期:
文章二维码