1.中国科学院上海微系统与信息技术研究所 集成电路材料全国重点实验室,上海 200050;2.中国科学院大学 材料与光电研究中心,北京 100049
国家重点研发计划(2023YFB3210303)
1.State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China;2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
Supported by National Key R&D Program of China (2023YFB3210303)
