75-325 GHz宽带CMOS太赫兹外差探测器
DOI:
CSTR:
作者:
作者单位:

1.沈阳航空航天大学;2.中国科学院沈阳自动化研究所

作者简介:

通讯作者:

中图分类号:

基金项目:

辽宁省青年科学基金项目B类( 2025JH6/101000029 );国家重点研发计划项目( 2023YFF0718303 );中国科学院沈阳自动化研究所基础研究计划项目( 2024JC1K08 )


75-325 GHz broadband CMOS terahertz heterodyne detector
Author:
Affiliation:

1.Shenyang Aerospace University;2.Shenyang Institute of Automation, Chinese Academy of Sciences

Fund Project:

Liaoning Provincial Youth Science Fund Project Category B( 2025JH6/101000029 ), National Key R&D Program of China ( 2023YFF0718303 ), Fundamental Research Project of SIA ( 2024JC1K08 )

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    本文基于180 nm CMOS工艺设计并实现了一款支持直接探测和外差探测两种工作模式的宽带太赫兹(THz)探测器芯片。探测器由环形天线、NMOS晶体管差分检波电路和阻抗匹配网络组成,面积为200×200 μm2。基于环形天线的双向辐射特性,提出了将射频(RF)与本振(LO)分置于探测器两侧的布局方案,该方案无需使用分束器耦合信号,从而避免了信号的衰减。LO信号由一个外部独立的太赫兹波源产生,与片内集成的LO相比,其在频率稳定性和输出功率等方面具有优势。为了抑制硅衬底的表面波损耗,芯片背面集成了一个直径d=12 mm、厚度t=8 mm的高阻硅透镜。测试结果显示,探测器的工作频率范围覆盖了75-325 GHz,外差探测噪声等效功率 (Noise Equivalent Power, NEP) 优于直接探测NEP 3个数量级以上。探测器在220 GHz频点下呈现出了最佳性能,外差探测NEP为6.26 fW/Hz,直接探测NEP为18.42 pW/Hz1/2。

    Abstract:

    This article presents the design and implementation of a broadband terahertz (THz) detector chip based on 180 nm CMOS technology, which supports both direct detection and heterodyne detection modes. The detector consists of a loop antenna, a NMOS transistor differential detection circuit, and an impedance matching network, with an area of 200 × 200 μm2. Based on the bidirectional radiation characteristics of the loop antenna, a layout scheme is proposed to separate the radio frequency (RF) and local oscillator (LO) on both sides of the detector, this scheme does not require the use of a beam splitter to couple the signal, thus avoiding signal attenuation. The LO signal is generated by an external independent terahertz wave source, which has advantages in frequency stability and output power compared to on-chip integrated LO. In order to suppress the surface wave loss of the silicon substrate, a high resistance silicon lens with a diameter of d=12 mm and a thickness of t=8 mm is integrated on the back of the chip. The test results show that the operating frequency range of the detector covers 75-325 GHz, and the heterodyne detection of noise equivalent power (NEP) is superior to direct detection of NEP by more than three orders of magnitude. The detector exhibited optimal performance at the frequency of 220 GHz, with a heterodyne detection NEP of 6.26 fW/Hz and a direct detection NEP of 18.42 pW/Hz1/2.

    参考文献
    相似文献
    引证文献
引用本文
相关视频

分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2025-05-08
  • 最后修改日期:2025-08-14
  • 录用日期:2025-08-29
  • 在线发布日期:
  • 出版日期:
文章二维码