基于FTIR的InAs和GaSb衬底低吸收区域吸收系数特性研究
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中国科学院上海微系统与信息技术研究所

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国家自然科学基金项目(面上项目,重点项目,重大项目)


Research on the Characteristics of Absorption Coefficient in the Low Absorption Region of InAs and GaSb Substrates Based on FTIR Spectroscopy Technology
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Shanghai Institute of Microsystem and Information Technology

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    摘要:

    作为中波红外(3-5 μm)与长波红外(8-12 μm)波段的重要候选材料,GaSb与InAs半导体展现出显著的光电特性优势。然而,其固有的低吸收特性使得传统透射光谱技术因多重透射效应干扰,难以实现吸收系数的精确表征。本研究创新性地利用傅里叶变换红外光谱技术,构建反射-透射联合分析模型,成功提高了低吸收区(α<10 cm?1)的测量准确度。通过系统研究掺杂浓度为2.46×101? cm?3(InAs)和8.76×101? cm?3(GaSb)的样品,发现8-18 μm波段自由载流子吸收行为呈现显著散射机制依赖性:声学声子散射与电离杂质散射共同主导该波段的吸收过程。定量分析表明,GaSb的散射参数较InAs存在数量级差异,其电离杂质散射系数提升10倍,声学声子散射系数更呈现450倍的剧烈增强。该反射-透射联合分析方法的提出,为解决低吸收材料光学参数表征难题提供了新的技术方案。

    Abstract:

    GaSb and InAs demonstrate significant potential photoelectric applications in mid-wave infrared (3-5 μm) and long-wave infrared (8-12 μm) spectral regions. However, their weak optical absorption properties hinder accurate determination of absorption coefficients via conventional transmission spectroscopy due to multi-pass transmission effects. This study introduces a combined reflection-transmission analysis method based on Fourier-transform infrared spectroscopy (FTIR), achieving enhancement in measurement accuracy within the low-absorption regime (α<10 cm?1). For samples with doping concentrations of ND=2.46×1016 cm-3 (InAs) and ND=8.76×1016 cm-3 (GaSb), the analysis reveals that free carrier absorption in the 8-18 μm range is predominantly governed by acoustic phonon scattering and ionized impurity scattering. Notably, GaSb exhibits significantly enhanced scattering intensity compared to InAs, with a 10-fold increase in ionized impurity scattering coefficient and a 450-fold amplification in acoustic phonon scattering coefficient. The developed methodology provides a technical framework for determining absorption coefficients in low-absorption materials.

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  • 收稿日期:2025-04-16
  • 最后修改日期:2025-06-22
  • 录用日期:2025-06-25
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