1.中国科学院上海技术物理研究所 红外物理国家重点实验室,上海 200083;2.中国科学院大学 杭州高等研究院物理与光电工程学院,杭州 310024;3.中国科学院大学,北京 100049;4.复旦大学 芯片与系统国家重点实验室 芯片与系统前沿技术研究院,上海 200043;5.上海大学微电子学院,上海 200444
1.State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai 200083, China.;2.College of Physics and Optoelectronic Engineering, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, No.1, Sub-Lane Xiangshan, Xihu District, Hangzhou 310024, China.;3.University of Chinese Academy of Sciences, No. 19 A Yuquan Road, Beijing 100049, China.;4.State Key Laboratory of Integrated Chips and Systems, Frontier Institute of Chip and System, Fudan University, Shanghai 200433, China.;5.School of Microelectronics, Shanghai University, Shanghai 200444, China.
Supported by Natural Science Foundation of China (Grant Nos.62105100).
