InAs/GaSb Ⅱ 类超晶格长波焦平面红外探测器应力适应性研究
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1.上海大学 微电子学院,上海 201800;2.中国科学院 上海技术物理研究所 红外成像材料与器件重点实验室,上海 200083

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中国科学院战略性先导科技专项(XDB0980000);国家自然科学基金(62335017, 62222412, 62104236, 62104237);上海市扬帆计划(22YF1455800, 21YF1455000);中国科学院上海技术物理研究所创新专项基金(CX-513,CX-567)


Research on stress adaptability of InAs/GaSb type Ⅱ superlattice long-wave focal plane infrared detectors
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Affiliation:

1.School of Microelectronics, Shanghai University, Shanghai 201800 , China;2.Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

Fund Project:

the Chinese Academy of Sciences (Grant No. XDB0980000); the National Natural Science Foundation of China (62335017, 62222412, 62104236, 62104237), the Shanghai Sailing Program (Grant No. 22YF1455800, 21YF1455000), Special Innovation Program of Shanghai Institute of Technical Physics, Chinese Academy of Sciences (Grant No.CX-513, CX-567)

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    摘要:

    超晶格长波红外焦平面探测器工作在低温条件下,探测器各层材料之间热膨胀系数的差异会引起探测器形变产生热应力,进而影响探测器的光电性能。本研究设计了两种应力调控方法的结构模型,实现了超晶格探测器应力的调控。探讨了不同应力作用下InAs/GaSb Ⅱ类超晶格长波焦平面红外探测器的暗电流和光谱响应的变化。研究表明在-10.7MPa-131.9MPa应力区间内,探测器光电性能变化幅度小。对探测器进行了温度冲击试验,探测器显示了高可靠性。我们的研究结果对于InAs/GaSb Ⅱ类超晶格长波焦平面红外探测器的结构设计具有指导意义,为其性能和可靠性评估提供依据。

    Abstract:

    The superlattice long-wavelength infrared focal plane detectors operate at low-temperatures. The differences in the thermal expansion coefficients among the various material layers of the detectors can lead to deformation and generate thermal stress, which in turn affects the optoelectrical performances of the detector. This study designed two structural modules to achieve the regulation of stress in the superlattice detectors. The changes in dark current and spectral response of InAs/GaSb type II superlattice long-wave infrared focal plane detectors under different stress conditions were explored. The research indicates that within the stress range of -10.7 MPa to 131.9 MPa, the variations in the optoelectrical performance of the detector is small. The detector was subjected to a temperature shock test, and it demonstrated high reliability. Our research results provide guidance for the structural design of InAs/GaSb type II superlattice long-wave infrared focal plane detectors and offer a basis for their performance and reliability assessment.

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  • 收稿日期:2025-02-17
  • 最后修改日期:2025-03-10
  • 录用日期:2025-03-17
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