1.中国科学院上海微系统与信息技术研究所集成电路材料全国重点实验室;2.上海大学微电子学院
O439
国家自然科学基金项目(面上项目,重点项目,重大项目)
1.State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai;2.School of Microelectronics, Shanghai University, Shanghai
National Natural Science Foundation of China (No. 62204250)