1.中国科学院上海微系统与信息技术研究所 集成电路材料全国重点实验室;2.上海理工大学 光电信息与计算机工程学院
国家自然科学基金(批准号:61927813, 62435020, 61991432)
1.State Key Laboratory of Materials for Integrated Circuits,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences;2.State Key Laboratory of Materials for Integrated Circuits,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences, Changning Road;3.School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology