动态范围超过75 dB的InGaAs/InAlAs光电导太赫兹探测天线制备与表征
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1.中国科学院上海微系统与信息技术研究所 集成电路材料全国重点实验室,上海 200050;2.中国科学院大学 材料与光电研究中心,北京 100049;3.上海理工大学 光电信息与计算机工程学院,上海 200093

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TN36

基金项目:

国家自然科学基金(61927813, 62435020, 12333012)


Fabrication and characterization of InGaAs/InAlAs photoconductive terahertz detection antenna with dynamic range exceeding 75 dB
Author:
Affiliation:

1.State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;3.School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

Fund Project:

Supported by the National Natural Science Foundation of China (61927813, 62435020, 12333012)

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    摘要:

    光电导天线是太赫兹频段非常重要的器件,在太赫兹时域光谱技术中应用广泛。本文采用分子束外延生长方法制备Be掺杂InGaAs/InAlAs超晶格材料,作为1 550 nm激光泵浦光电导太赫兹探测天线的光吸收材料,制备的材料方块电阻大于106 Ω/sq、电子迁移率为216 cm2/(V?s);采用湿法腐蚀和磁控溅射工艺分别制备探测天线有源区台面和电极结构,并将天线芯片封装在PCB电路板上。采用国产1 550 nm飞秒泵浦激光器搭建探测天线测试系统,对电极间隙分别为40 μm和60 μm的探测天线进行了表征;测量结果表明,60 μm天线具有更宽的谱宽和功率动态范围,分别达到4.0 THz和77.0 dB。

    Abstract:

    The photoconductive antenna is a very important device in the terahertz region and is widely used in terahertz time-domain spectroscopy technology. This article uses the molecular beam epitaxy method to grow Be-doped InGaAs/InAlAs superlattice as light absorbing materials for 1550 nm laser pumped photoconductive antenna for terahertz detection. The prepared materials have a sheet resistance greater than 106 Ω/sq and an electron mobility of 216 cm2/(V?s). The active mesa and electrode structure of the detection antenna are prepared using wet etching and magnetron sputtering processes, and the antenna chip is packaged on a PCB board. A detection antenna measurement system is built by employing a domestically produced 1550 nm femtosecond pump laser, and the detection antennas with electrode gaps of 40 μm and 60 μm are characterized. The measurement results indicate that the 60 μm antenna has a wider spectral width and power dynamic range, reaching 4.0 THz and 77.0 dB, respectively.

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江情男,谭智勇,万文坚,符张龙,夏宇,李敏,曹俊诚.动态范围超过75 dB的InGaAs/InAlAs光电导太赫兹探测天线制备与表征[J].红外与毫米波学报,2025,44(4):562~568]. JIANG Qing-Nan, TAN Zhi-Yong, WAN Wen-Jian, FU Zhang-Long, XIA Yu, LI Min, CAO Jun-Cheng. Fabrication and characterization of InGaAs/InAlAs photoconductive terahertz detection antenna with dynamic range exceeding 75 dB[J]. J. Infrared Millim. Waves,2025,44(4):562~568.]

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  • 收稿日期:2024-10-28
  • 最后修改日期:2025-05-15
  • 录用日期:2024-12-09
  • 在线发布日期: 2025-05-12
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