低功耗、高散热效率太赫兹量子级联激光器的研究
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1.中国科学院上海技术物理研究所;2.中国科学院大学;3.河北半导体研究所;4.上海交通大学物理与天文学院;5.国科大杭州高等研究院

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国家自然科学基金项目(面上项目,重点项目,重大项目)(62435020,62235010,12393833,12274285,12074249)


Research on low-power consumption, high heat dissipation efficiency terahertz quantum cascade laser
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1.Shanghai Institute of technical Physics, Chinese Academy of Sciences;2.University of Chinese Academy of Sciences;3.HeBei Semiconductor Research Institute;4.School of Physics and Astronomy, Shanghai Jiao Tong University;5.Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences

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    摘要:

    提出并实现了以二维贴片天线阵列为谐振腔的单模太赫兹量子级联激光器(THz-QCL)。单个贴片天线中有源区处在上下金属层之间,具有全尺度亚波长特性,并激发竖直方向低辐射损耗的电四极子模式。阵列内天线之间的交互耦合有效抑制了电磁场在平面内的泄漏。因此,当阵列仅包含少数天线时即获得高的品质因子和低的阈值电流密度。由此,激光器功耗低至950 mW。此外,离散分布的天线阵列使得散热面积远大于发热面积,结合非泵浦区域提供的横向散热通道,激光器的单位面积热阻低至5.6 mK/W/cm2。通过显著降低激光器功耗、提升散热效率,所研制的激光器激光频率为3.18 THz,边模抑制比达19.5 dB,光束发散角35°×35°,20 K时连续工作达到3.14 mW,最高连续工作温度达到90 K,显著高于相同材料研制的法布里-泊罗腔激光器的工作温度。本工作为提高THz-QCL的连续工作温度提供了新的思路。

    Abstract:

    A single-mode terahertz quantum cascade laser (THz-QCL) with a two-dimensional patch antenna array as a resonant cavity is proposed and realized. The active region of each patch antenna is sandwiched between two metal layers, exhibiting full-scale subwavelength characteristics and exciting a vertical electric quadrupole mode with low radiation loss. The inter-antenna coupling within the array effectively suppresses electromagnetic leakage in the plane, allowing for a high-quality factor and low threshold current density even with only a few antennas in the array. As a result, the laser's power consumption is reduced to 950 mW. Moreover, the discrete antenna array design provides a larger heat dissipation area compared to the heat-generating area, and with the lateral heat dissipation channels offered by the unpumped regions, the thermal resistance per unit area is as low as 5.6 mK/W/cm2. By significantly reducing power consumption and enhancing heat dissipation efficiency, the laser achieves a lasing frequency of 3.18 THz, a side-mode suppression ratio (SMSR) of 19.5dB, and a beam divergence angle of 35°× 35°. It operates continuously at 3.14 mW at 20 K, with a maximum continuous operation temperature of 90 K, notably higher than that of Fabry-Pérot cavity lasers made from the same material. This work provides a novel approach to improving the continuous operating temperature of THz-QCLs.

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  • 收稿日期:2024-10-20
  • 最后修改日期:2024-11-15
  • 录用日期:2024-11-20
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