吸收电荷倍增分离型雪崩光电探测器的穿通现象研究
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1.北京工业大学 信息科学技术学院 光电子技术教育部重点实验室,北京 100124;2.北京工业大学 物理与光电工程学院 先进半导体光电技术研究所,北京 100124

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TN364+.2

基金项目:

国家自然科学基金(62375008);国家重点研发计划(2021FYB2206500);中国科学院青年基础研究项目(YSBR-056);中国科学院前沿科学重点研究计划(ZDBS-LY-JSC008)


Research on the punch-through phenomenon of separate absorption, charge and multiplication avalanche photodetectors
Author:
Affiliation:

1.Key Laboratory of Optoelectronics Technology of Ministry of Education, School of Information Science and Technology, Beijing University of Technology, Beijing 100124, China;2.Institute of Advanced Semiconductor Optoelectronic Technology, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing 100124, China

Fund Project:

Supported by the National Natural Science Foundation of China (62375008); the National Key Research and Development Program of China (2021FYB2206500); the CAS Project for Young Scientists in Basic Research (YSBR-056); the CAS Key Research Program of Frontier Sciences (ZDBS-LY-JSC008)

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    摘要:

    本文研究了吸收电荷倍增分离型雪崩光电探测器(Separate Absorption, Charge and Multiplication Avalanche Photodetector,SACM APD)的穿通特性。基于器件的光谱响应、电容特性以及不同工作温度下的I-V特性,结合SILVACO仿真平台计算得到了器件内部电场和能带分布,分析了SACM型APD穿通前后的器件性能并建立了相应的数学模型。通过优化硅基SACM型APD器件的结构参数和工艺参数,当场控层离子注入能量为580 keV时,仿真得到,优化结构器件的穿通阈值电压为-30 V,电容降低至穿通前的1/3。基于互补金属氧化物半导体(Complementary Metal-Oxide-Semiconductor,CMOS)工艺制备了硅SACM型APD器件。测试得到器件的穿通阈值电压为-30 V,穿通时光电流升高至原来的2.18倍(808 nm),响应峰值波长由穿通前的590 nm红移至穿通后的820 nm,峰值响应度由0.171 A/W@590 nm升高至0.377 A/W@820 nm,电容降低为穿通前的1/3(1 MHz)。

    Abstract:

    This paper investigates the punch-through characteristics of separate absorption, charge and multiplication avalanche photodetector (SACM APD). By analyzing the device''s spectral response, capacitance characteristics, and I-V characteristics at various operating temperatures, and combining these with simulated internal electric field and energy band distributions from the SILVACO platform, we analyzed examined the performance of the SACM APD before and after punch-through and established a corresponding mathematical model. Through structural and process parameter optimization for silicon-based SACM APD devices, simulations revealed that when the ion implantation energy of the field-control layer was 580 keV, the optimized device exhibited a punch-through threshold voltage of -30 V and a capacitance reduction to one-third of the pre-punch-through value. Subsequently, a silicon SACM APD device was fabricated using the complementary metal-oxide-semiconductor (CMOS) process. Measurements confirmed a punch-through threshold voltage of -30 V, a 2.18-fold increase in photocurrent at 808 nm (punch-through), a redshift of the peak responsivity wavelength from 590 nm (pre-punch-through) to 820 nm (post-punch-through), and an elevation of the peak responsivity from 0.171 A/W@590 nm to 0.377 A/W@820 nm. The capacitance was also reduced to one-third of the pre-punch-through value at 1 MHz.

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李冲,马子怡,杨帅,刘玥雯,王稼轩,刘云飞,董昱森,李紫倩,刘殿波.吸收电荷倍增分离型雪崩光电探测器的穿通现象研究[J].红外与毫米波学报,2025,44(3):327~334]. LI Chong, MA Zi-Yi, YANG Shuai, LIU Yue-Wen, WANG Jia-Xuan, LIU Yun-Fei, DONG Yu-Sen, LI Zi-Qian, LIU Dian-Bo. Research on the punch-through phenomenon of separate absorption, charge and multiplication avalanche photodetectors[J]. J. Infrared Millim. Waves,2025,44(3):327~334.]

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  • 收稿日期:2024-09-10
  • 最后修改日期:2025-03-24
  • 录用日期:2024-10-29
  • 在线发布日期: 2025-03-17
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