宽带高功率三维异构集成微波光子探测器
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1.南京航空航天大学 电子信息工程学院;2.中国电子科技集团公司第十三研究所

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国家自然科学基金项目(面上项目,重点项目,重大项目)(62271249),国家重点基础研究发展计划(973计划)(2022YFB2802700)


Wideband and High Power 3D Heterogeneous Integration Photoreceiver
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1.College of Electronic and Information Engineering,Nanjing University of Aeronautics and Astronautics;2.The th Research Institute,CETC

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    摘要:

    本研究采用芯片堆叠的三维异构集成技术实现单行载流子光电二极管与微波集成电路的异构集成,研制出一款高功率、宽带微波光子探测器芯片。通过优化单行载流子光电二极管的材料掺杂和外延工艺,显著提高了其功率承受能力;采用集成背入射透镜和增设金属反射层的设计,有效提升了其响应度;通过提取光电二极管的精确模型并采用阻抗补偿及宽带匹配电路设计技术,成功增强了其宽带特性。将光电二极管芯片通过倒装焊接技术集成在微波集成电路芯片上,大幅减小了芯片互连电路对高频性能的不利影响。通过金锡合金微凸点互连和高导热率底层芯片的设计,极大提升了探测器芯片的导热性能和高功率处理特性。借助单行载流子光电二极管独特的功率特性,研制的三维异构集成光电探测器的1dB带宽高达42GHz,射频回波损耗超过11dB,响应度超过0.85A/W,暗电流低于50nA,饱和输入光功率超过120mw。

    Abstract:

    In this study, we present an innovative three-dimensional (3D) heterogeneously integrated photoreceiver, which is optimized for analog microwave optical links that demand both wide bandwidth and high input optical power. The key of this design is the uni-traveling-carrier photodiode (UTC-PD), which has been flip-chip integrated onto a microwave integrated circuit submount. This integration approach enhances the photoreceiver"s overall performance, making it ideally suitful for applications requiring wide bandwidth and high power handling capabilities. The material doping and epitaxial processes of the UTC photodiode were optimized to augment its power endurance. Meanwhile, the responsivity of the photodiode was improved through the adoption of an integrated back-illuminated lens complemented by the addition of a metallic reflective layer. By establishing a precise model of the photodiode, we have refined the bandwidth characteristics of the photoreceiver using impedance compensation and broadband matching circuit design techniques. Flip-chip bonding the photodiode chip onto the microwave integrated circuit chip has substantially mitigated the impact of interconnect circuits on high-frequency performance. Furthermore, the thermal conductivity and high-power resilience of the detector chip were enhanced via gold-tin alloy micro-bump interconnections and the design of a high thermal conductivity substrate layer. The three-dimensional heterogeneous integrated photoreceiver features a 1-dB bandwidth of 42 GHz, an RF return loss exceeding 11 dB, a responsivity surpassing 0.85 A/W, a dark current below 50 nA, and a saturated input optical power of over 120 mW.By leveraging the distinctive properties of the UTC-PD, our three-dimensional (3D) heterogeneous integrated photoreceiver design achieves superior efficiency and responsiveness, positioning it as a leading solution for cutting-edge microwave photonics applications.

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  • 收稿日期:2024-04-26
  • 最后修改日期:2024-05-20
  • 录用日期:2024-05-21
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