1.中国科学院大学,北京100049;2.中国科学院半导体研究所 集成光电子国家重点实验室,北京100083;3.北京怀柔仪器和传感器有限公司,北京101400
1.University of Chinese Academy of Sciences, Beijing 100049, China;2.State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;3.Beijing Huairou Instruments and Sensors Co, Ltd, Beijing 101400, China
Supported by Beijing Natural Science Foundation (424206) and the Youth Innovation Promotion Association, CAS (2021108).