InP基HEMT的整体小凹槽偏移与电性能的相关性
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中科院微电子研究所高频高压中心

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太赫兹多用户射频收发系统研制


Correlation Between the whole small recess offset and Electrical Performance of InP-based HEMTs
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High Frequency and High Voltage Center of Institute of Microelectronics, Chinese Academy of Sciences

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    摘要:

    在这项工作中,我们研究了整个小凹槽偏移对InP高电子迁移率晶体管(HEMT) 的直流和射频特性的影响。Lg = 80 nm HEMT 采用双凹栅极工艺制造。我们重点关注它们的直流和射频响应,包括最大跨导(gm_max)、导通电阻 (RON)、电流增益截止频率 (fT) 和最大振荡频率 (fmax)。这些设备具有几乎相同的 RON。 随着整个小凹槽向源移动,gm_max 会提高。 然而,尽管整个小栅极凹槽向漏极移动会导致较小的 gm_max,但较小的栅源电容 (Cgs) 和较小的漏极输出电导 (gds) 会导致最大的fT。 根据小信号建模,整个小凹槽朝向漏极的器件表现出优异的射频特性,例如fT = 372 GHz和fmax = 394 GHz。这一结果是通过注意调整电阻和电容寄生效应来实现的,这些寄生效应在高频响应中起着关键作用。

    Abstract:

    In this work, we investigate the impact of the whole small recess offset on DC and RF characteristics of InP high electron mobility transistors (HEMTs). Lg = 80 nm HEMTs are fabricated with a double-recessed gate process. We focus on their DC and RF responses, including the maximum transconductance (gm_max), ON-resistance (RON), current-gain cutoff frequency (fT), and maximum oscillation frequency (fmax). The devices have almost same RON. The gm_max improves as the whole small recess moves toward the source. However, a small gate to source capacitance (Cgs) and a small drain output conductance (gds) lead to the largest fT, although the whole small gate recess moves toward the drain leads to the smaller gm_max. According to the small-signal modeling, the device with the whole small recess toward drain exhibits an excellent RF characteristics, such as fT = 372 GHz and fmax = 394 GHz. This result is achieved by paying attention to adjust resistive and capacitive parasitics, which play a key role in high-frequency response.

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  • 收稿日期:2024-03-05
  • 最后修改日期:2024-04-22
  • 录用日期:2024-04-23
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