1.中国科学院上海技术物理研究所 红外物理国家重点实验室,上海 200083;2.中国科学院大学,北京 100049;3.国科大杭州高等研究院 物理与光电工程学院,浙江 杭州 310024;4.之江实验室,浙江 杭州 311100;5.上海科技大学 物质科学与技术学院,上海 201210
TN3
1.State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2.University of Chinese Academy of Sciences, Beijing 100049, China;3.College of Physics and Optoelectronic Engineering, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China;4.Zhejiang Laboratory, Hangzhou 311100, China;5.School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China
Supported by National Key R&D Program of China(2023YFA1608701), National Natural Science Foundation of China(62274168, 11933006, U2141240), and Hangzhou Leading Innovation and Entrepreneurship Team (TD2020002)
HABIBA Um E,陈天业,刘赤县,窦伟,刘晓燕,凌静威,潘昌翊,王鹏,邓惠勇,沈宏,戴宁.晶体锗掺硼的离子注入工艺与晶格损伤机理研究[J].红外与毫米波学报,2024,43(6):749~754]. HABIBA Um E, CHEN Tian-Ye, LIU Chi-Xian, DOU Wei, LIU Xiao-Yan, LING Jing-Wei, PAN Chang-Yi, WANG Peng, DENG Hui-Yong, SHEN Hong, DAI Ning. Ion implantation process and lattice damage mechanism of boron doped crystalline germanium[J]. J. Infrared Millim. Waves,2024,43(6):749~754.]
复制