V/III比对分子束外延 生长的GaAs基InAsxSb1-x电子迁移率的影响
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1.陕西科技大学;2.西安交通工程学院;3.河北科技大学

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陕西省2023年自然科学基础研究计划,编号:2023-JC-QN-0758。陕西科技大学科研启动项目,编号:2020BJ-26。河北科技大学科研启动项目,编号:1181476。


The influence of V/III ratio on electron mobility of the InAsxSb1-x layers grown on GaAs substrate by molecular beam epitaxy
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Affiliation:

1.Shaanxi University of Science and Technology;2.Xi’an Traffic Engineering Institute;3.Hebei University of Science and Technology

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the Natural Science Basic Research Plan in Shaanxi Province of China (Grant No. 2023-JC-QN-0758), Shaanxi University of Science and Technology Research Launch Project (Grant No. 2020BJ-26). Doctoral Research Initializing Fund of Hebei University of Science and Technology, China (No. 1181476).

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    摘要:

    本文研究了Sb/In比对200 nm InAsxSb1-x薄膜传输特性和晶体质量的影响。通过对称(004)扫描和非对称(115)扫描的HRXRD计算了所有样品中InAsxSb1-x薄膜的Sb含量。计算结果表明,在Sb/In比为6和As/In比为3的条件下生长的InAsxSb1-x薄膜中,Sb组分为0.6。InAsxSb1-x薄膜在室温下测得的最高电子迁移率为28560 cm2/V·s。同时,本文还研究了Sb/In比和As/In比对Al0.2In0.8Sb/InAsxSb1-x量子阱异质结的输运性质和晶体质量的影响。结果显示,在Sb/In比为6和As/In比为3的条件下生长的沟道厚度为30 nm的Al0.2In0.8Sb/InAs0.4Sb0.6量子阱异质结的最高电子迁移率为28300 cm2/V·s,最小表面粗糙度为0.68 nm。通过优化生长条件,我们的样品具有更好的晶体质量和更光滑的表面形貌。

    Abstract:

    This paper discusses the influence of Sb/In ratio on the transport properties and crystal quality of the 200 nm InAsxSb1-x thin film. The Sb content of InAsxSb1-x thin film in all sample was verified by HRXRD of the symmetrical 004 reflections and asymmetrical 115 reflections. The calculation results show that the Sb component is 0.6 in the InAsxSb1-x thin film grown under the conditions of Sb/In ratio of 6 and As/In ratio of 3, which has the highest electron mobility (28560 cm2/V·s) at 300 K. At the same time, the influence of V/III ratio on the transport properties and crystal quality of Al0.2In0.8Sb/InAsxSb1-x quantum well heterostructures also has been investigated. As a result, the Al0.2In0.8Sb/InAs0.4Sb0.6 quantum well heterostructure with a channel thickness of 30 nm grown under the conditions of Sb/In ratio of 6 and As/In ratio of 3 has a maximum electron mobility of 28300 cm2/V·s and a minimum RMS roughness of 0.68 nm. Through optimizing the growth conditions, our samples have higher electron mobility and smoother surface morphology.

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  • 收稿日期:2024-01-20
  • 最后修改日期:2024-03-07
  • 录用日期:2024-03-12
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