面向OCT应用的氮化硅波导基超宽带片上光源
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作者单位:

1.西安市微波光子与光通信重点实验室;2.西安邮电大学,电子工程学院

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中图分类号:

TN252

基金项目:

国家自然科学基金(61875165);陕西省重点研发计划项目(2022GY-008);陕西省自然科学基础研究计划项目(2022JQ-638);陕西省创新能力支撑计划项目(2022PT-15);陕西省教育厅协同创新项目(20JY060)


Study of Silicon Nitride Waveguide-Based Ultra-Wideband On-Chip Light Source for OCT Applications
Author:
Affiliation:

1.Xi'2.'3.an Key Laboratory of Microwave Photonics and Optical Communication, Xi’an University of Posts and Telecommunications;4.School of Electronic Engineering, Xi’an University of Posts and Telecommunications

Fund Project:

Supported by the National Natural Science Foundation of China (61875165); the Key Research and Development Program Projects of Shaanxi Province (2022GY-008); the Natural Science Basic Research Program of Shaanxi (2022JQ-638); the Shaanxi Provincial Innovation Capability Support Program Project (2022PT-15), and the Collaborative Innovation Projects of Education Office of Shaanxi Province (20JY060)

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    摘要:

    光学相干层析成像(Optical Coherence Tomography,OCT)技术具有非侵入、高分辨率、可实时成像等优点,在生物医学、材料学及红外传感等众多领域被广泛应用。本文设计了一种基于氮化硅(Si3N4)的脊形悬空光波导,基于时域有限差分法对所设计波导的主要结构参数进行了优化,并研究了该波导中产生的超连续谱特性。数值模拟结果表明,在脊宽=750nm、脊高=700nm、平板厚度=200nm以及上覆层高=150nm的优化结构下,当入射泵浦光波长为1.3μm,峰值功率为2kW,和脉宽为50fs时,基于该光波导可以产生波长覆盖可见光至中红外(703~4014nm)的宽带超连续谱。这一结果对于促进片上集成宽带光源在生物医学等领域的应用具有重要作用。

    Abstract:

    Optical coherence tomography (OCT) technology has the advantages of non-invasive, high-resolution, and real-time imaging, which is widely used in various fields such as biomedicine, material science and infrared sensing. In this paper, a ridge suspended optical waveguide based on silicon nitride (Si3N4) is proposed. The structural parameters of the designed waveguide were optimized by using finite difference time domain (FDTD) method. The characteristics of the supercontinuum spectrum generated in the optimized waveguide were investigated The simulation results show that for the optimized optical waveguide structure with ridge width of 750nm, ridge height of 700nm, plate thickness of 200nm, and upper layer height of 150nm, when a pump light with wavelength of 1.3μm, peak power of 2kW and pulse width of 50fs was injected into the waveguide, a broadband supercontinuum spectrum with wavelength covering the visible to the mid-infrared region (703~4014nm) can be generated. This work plays an important role in promoting the application of on-chip integrated broadband light source in biomedical imaging and related fields.

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  • 收稿日期:2023-12-25
  • 最后修改日期:2024-01-25
  • 录用日期:2024-02-22
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