光刻法制备的长波红外超透镜
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作者单位:

1.上海科技大学物质科学与技术学院, 上海 201210;2.中国科学院上海技术物理研究所红外物理国家重点实验室, 上海 200083;3.上海师范大学物理系, 上海 200234;4.上海节能镀膜玻璃工程技术研究中心, 上海 200083;5.中国科学院大学, 北京 100049

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O43

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Long wavelength infrared metalens fabricated by photolithography
Author:
Affiliation:

1.School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China;2.State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;3.Department of Physics, Shanghai Normal University, Shanghai 200234, China;4.Shanghai Engineering Research Center of Energy-Saving Coatings, Shanghai 200083, China;5.University of Chinese Academy of Sciences, Beijing 100049, China

Fund Project:

Supported by National Key R&D Program of China (2021YFA0715500), National Natural Science Foundation of China (NSFC) (12227901), Strategic Priority Research Program (B) of the Chinese Academy of Sciences (XDB0580000) and Chinese Academy of Sciences President''s International Fellowship Initiative (2021PT0007).

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    摘要:

    长波红外的超表面在热成像、大气遥感和目标识别等领域具有巨大的应用潜力。在这项研究中,我们设计并实验展示了一种 4 mm 尺寸的全硅超表面透镜,其具有大焦深,可在 9 μm 至 11.5 μm范围内工作。实验结果证实了超透镜在长波红外区域的有效聚焦和成像能力,为超透镜技术在长波红外领域的实际应用铺平了道路。

    Abstract:

    Metasurfaces in the long wave infrared (LWIR) spectrum hold great potential for applications in thermal imaging, atmospheric remote sensing, and target identification, among others. In this study, we designed and experimentally demonstrated a 4 mm size, all-silicon metasurface metalens with large depth of focus operational across a broadband range from 9 μm to 11.5 μm. The experimental results confirm effective focusing and imaging capabilities of the metalens in LWIR region, thus paving the way for practical LWIR applications of metalens technology.

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李云鹏,罗嘉诚,冀若楠,谢茂彬,崔文楠,王少伟,刘锋,陆卫.光刻法制备的长波红外超透镜[J].红外与毫米波学报,2024,43(5):603~608]. LI Yun-Peng, LUO Jia-Cheng, JI Ruo-Nan, XIE Mao-Bin, CUI Wen-Nan, WANG Shao-Wei, LIU Feng, LU Wei. Long wavelength infrared metalens fabricated by photolithography[J]. J. Infrared Millim. Waves,2024,43(5):603~608.]

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  • 收稿日期:2023-12-07
  • 最后修改日期:2024-08-08
  • 录用日期:2024-03-12
  • 在线发布日期: 2024-08-20
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