8.5 μm高性能长波红外量子级联激光器的光学腔面镀膜研究
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作者单位:

1.中国科学院半导体研究所 固态光电信息技术重点实验室;2.中国科学院半导体研究所 半导体材料科学重点实验室

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中图分类号:

O43

基金项目:

国家自然科学基金


Optical facet coatings for high-performance LWIR quantum cascade lasers at λ ~ 8.5 μm
Author:
Affiliation:

1.Laboratory of Solid-State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences;2.Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences

Fund Project:

the National Natural Science Foundation of China

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    摘要:

    我们通过研究和优化长波红外量子级联激光器(LWIR QCLs)的光学腔面增透(AR)膜来提高器件的输出性能。与Al2O3膜系相比,Y2O3 AR膜表现出更高的灾难性光学镜损伤(COMD)水平,两种膜系的光学腔面镀膜均无光束转向效应。对激射波长为8.5 μm的3 mm腔长、9.5 μm脊宽掩埋异质结(BH)LWIR QCL使用Y2O3膜系的金属高反(HR)膜和反射率约0.2 %的AR膜,在298 K下获得了2.19 W的最高脉冲峰值功率,较未镀膜器件提高149 %。对于连续(CW)操作,通过优化Y2O3 AR膜的反射率,最高输出功率达到0.73 W,较未镀膜器件提高91 %。

    Abstract:

    We report on the performance improvement of long-wave infrared quantum cascade lasers (LWIR QCLs) by studying and optimizing the anti-reflection (AR) optical facet coating. Compared to Al2O3 AR coating, the Y2O3 AR coating exhibits higher catastrophic optical mirror damage (COMD) level, and the optical facet coatings of both material systems have no beam steering effect. A 3-mm-long, 9.5-μm-wide buried heterostructure (BH) LWIR QCL of λ ~ 8.5 μm with Y2O3 metallic high-reflection (HR) and AR of ~ 0.2 % reflectivity coating demonstrates a maximum pulsed peak power of 2.19 W at 298 K, which is 149% higher than that of uncoated device. For continuous-wave (CW) operation, by optimizing the reflectivity of the Y2O3 AR coating, the maximum output power reaches 0.73 W, which is 91% higher than the uncoated device.

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历史
  • 收稿日期:2023-11-22
  • 最后修改日期:2023-12-15
  • 录用日期:2023-12-19
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