单片集成式中波碲镉汞偏振焦平面阵列
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昆明物理研究所

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O43

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本项工作由昆明物理研究所自筹项目支持


A Monolithic Integrated Medium Wave Mercury Cadmium Telluride Polarimetric Focal Plane Array
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Kunming Institute of Physics

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This work is supported by the self-funded project of Kunming Institute of Physics

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    摘要:

    提出了一种中波640×512(25 μm)的碲镉汞偏振焦平面阵列。从线栅结构优化和串扰抑制的层面,对微偏振片阵列进行了精心设计;探索了一种低损伤的片上微纳制备工艺,经验证,该工艺与碲镉汞器件兼容良好。在完成微偏振片阵列的片上集成后,NETD仍能保持在9.5 mK以下。进一步地,为揭示主导消光比的潜在作用机制,设计了特殊的微偏振阵列排布方式,据此实验上证实了串扰效应是影响消光比的主要来源。将像元边缘的遮挡区域扩展至4 μm宽,能够将来自相邻像元的串扰率有效降低至大约2%,并实现在17.32~27.41之间的优良消光比。

    Abstract:

    A medium wave (MW) 640×512 (25 μm) Mercury Cadmium Telluride (HgCdTe) polarimetric focal plane array (FPA) was demonstrated. The micro-polarizer arrays (MPA) has been carefully designed in terms of line grating structure optimization and crosstalk suppression. An on-chip micro-nano fabrication process with low damage was explored, which was verified to be compatible well with HgCdTe devices. After monolithic integration of MPA, NETD < 9.5 mK was still maintained. Furthermore, to figure out the underlying mechanism that dominates extinction ratio (ER), specialized MPA layouts were designed, and the crosstalk was experimentally validated as the major source that impacts ER. By expanding opaque regions at pixel edges to 4 μm, crosstalk rates from adjacent pixels can be effectively reduced to approximately 2%, and promising ERs ranging from 17.32 to 27.41 were implemented.

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历史
  • 收稿日期:2023-11-05
  • 最后修改日期:2023-12-03
  • 录用日期:2023-12-06
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