宽波段响应硅雪崩光电探测器研究
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作者单位:

1.中国科学院半导体研究所固态光电信息技术实验室;2.西南技术物理研究所;3.Physics Department,Lancaster University,Lancaster LA YB,UK

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TN215 TN23

基金项目:

国家重点研发计划(2018YFE0200900)


Research on Silicon Avalanche Photodetector with Wideband Response
Author:
Affiliation:

1.Laboratory of Solid State Optoelectronics Information Technology,Institute of Semiconductors,CAS;2.Southwest Institute of Technical Physics,Chengdu,SiChuan, China;3.Physics Department,Lancaster University,Lancaster LA YB,UK

Fund Project:

State Key Development Program for Basic Research of China (2018YFE0200900)

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    摘要:

    基于目前对宽波段探测器的应用需求,设计了一种在250-1100nm范围都有较高响应的硅雪崩光电探测器(Si APD),不需要拼接即可实现紫外-可见-近红外波段光的高效探测。分别对硅的紫外增强和(近)红外增强进行了分析,在此基础上,为获得宽波段响应Si APD,对器件结构进行模拟设计,采用光背入射等方式,提高短波吸收,同时保证近红外吸收。模拟优化的Si APD器件峰值波长940nm左右,在250nm和1100nm处响应光电流均超过峰值的15%,这种结构的器件适用于多光谱及未来高精度探测等应用领域。

    Abstract:

    Based on the current application requirements for wideband response photodetectors, we designed a novel silicon avalanche photodetector (Si APD) offers high response in a broad spectral range of 250-1100nm and is capable to achieve efficient detection of three bands of ultraviolet, visible and near-infrared light without the need of splicing. The enhancement of ultraviolet band and infrared band of silicon were separately analyzed. This was followed by simulation on the device structure designs using different methods such as back incidence, to improve short wavelength absorption while maintaining a high infrared absorption. The Si APD shows a peak wavelength at around 940nm and a high photoresponse at 250nm and 1100nm which exceed 15% of the peak responsivity. This type of device is suitable for multispectral applications and future high-precision detection.

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历史
  • 收稿日期:2023-10-23
  • 最后修改日期:2023-12-11
  • 录用日期:2023-12-13
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