1280 × 1024元InAs/GaSb II类超晶格中/中波双色红外焦平面探测器
DOI:
作者:
作者单位:

上海技术物理研究所

作者简介:

通讯作者:

中图分类号:

基金项目:


1280×1024 dual-color mid-wavelength infrared InAs/GaSb superlattice focal plane arrays
Author:
Affiliation:

Shanghai Institute of Technical Physics

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    本文报道1280 × 1024元InAs /GaSb II 类超晶格中/中波双色红外焦平面阵列探测器的研究结果。探测器采用PN-NP叠层双色外延结构,信号提取采用叠层双色结构和顺序读出方式。运用分子束外延技术在GaSb 衬底上生长超晶格材料,双波段红外吸收区的超晶格周期结构分别为中波1:6 ML InAs /7 ML GaSb和中波2:9 ML InAs /7 ML GaSb。焦平面阵列像元中心距为12μm。在80 K 时测试,器件双波段的工作谱段为中波1:3μm~4μm,中波2:3.8μm~5.2μm。中波1器件平均峰值探测率达到6.32×1011cmHz1/2W-1,中波2器件平均峰值探测率达到2.84×1011cmHz1/2W-1。红外焦平面偏压调节成像测试得到清晰的双波段成像。本文是国内首次报导1280 × 1024规模InAs/GaSb II类超晶格中/中波双色红外焦平面探测器。

    Abstract:

    In this paper, we report research results of 1280×1024 dual-color mid-wavelength infrared InAs/GaSb superlattice focal plane arrays. The detector structure is PN-NP epitaxial multilayer and the signal is read out by sequential mode. The superlattice structure was grown on GaSb substrate using molecular beam epitaxy (MBE) technology. The respective structure of each absorption region are Mid-Wavelength 1(MW1): 6ML ( InAs) /7ML ( GaSb) and Mid-Wavelength 2 (MW2) : 9ML ( InAs) /7ML ( GaSb). The pixel center distance of the detector is 12μm. At 80 K measurement, the detector has spectral response wavelength of 3-4μm and 3.8-5.2μm respectively; The MW1 detector has a peak detectivity of 6.32×1011cmHz1/2W-1; The MW2 detector has a peak detectivity of 2.84×1011cmHz1/2W-1.Infrared images of both wavebands have been taken using infrared imaging test by adjusting devices voltage bias. Its the first time 1280 × 1024 InAs/GaSb Type II superlattice mid-wave length two-color infrared focal plane detector has been reported in China.

    参考文献
    相似文献
    引证文献
引用本文
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2023-09-26
  • 最后修改日期:2023-10-11
  • 录用日期:2023-10-19
  • 在线发布日期:
  • 出版日期: